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Volumn 109-110, Issue , 1997, Pages 25-29

Ablation of submicron structures on metals and semiconductors by femtosecond UV-laser pulses

Author keywords

Ablation; Femtosecond UV laser pulses; Metals; Silicon

Indexed keywords

LASER ABLATION; LASER PULSES; MORPHOLOGY; SEMICONDUCTING GERMANIUM; SEMICONDUCTING SILICON; SURFACE STRUCTURE; THERMAL DIFFUSION IN SOLIDS;

EID: 0031074973     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(96)00615-0     Document Type: Article
Times cited : (82)

References (12)
  • 8
    • 0003342263 scopus 로고
    • Laser-Beam Interactions with Materials
    • Springer, Berlin
    • M. v. Allmen, Laser-Beam Interactions with Materials. Series in Materials Science, Vol. 2 (Springer, Berlin, 1987).
    • (1987) Series in Materials Science , vol.2
    • Allmen, M.V.1
  • 9
    • 0003997703 scopus 로고
    • 23rd ed. Teubner, Stuttgart, 99 pp.
    • F. Kohlrausch, Praktische Physik, Vol. 3, 23rd ed. (Teubner, Stuttgart, 1986) 99 pp.
    • (1986) Praktische Physik , vol.3
    • Kohlrausch, F.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.