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Volumn 109-110, Issue , 1997, Pages 25-29
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Ablation of submicron structures on metals and semiconductors by femtosecond UV-laser pulses
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Author keywords
Ablation; Femtosecond UV laser pulses; Metals; Silicon
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Indexed keywords
LASER ABLATION;
LASER PULSES;
MORPHOLOGY;
SEMICONDUCTING GERMANIUM;
SEMICONDUCTING SILICON;
SURFACE STRUCTURE;
THERMAL DIFFUSION IN SOLIDS;
FEMTOSECOND ULTRAVIOLET LASER PULSES;
SUBMICRON STRUCTURES;
METALS;
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EID: 0031074973
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/S0169-4332(96)00615-0 Document Type: Article |
Times cited : (82)
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References (12)
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