Ultraviolet laser microstructuring of silicon and the effect of laser pulse duration on the surface morphology

Applied Surface Science

Volumn 252, Issue 13 SPEC. ISS., 2006, Pages 4462-4466

  Skantzakis, E ^a,b   Zorba, V ^a   Papazoglou, D G ^a   Zergioti, I ^b   Fotakis, C ^a,c  

^a INSTITUTE OF ELECTRONIC STRUCTURE AND LASER   (Greece)

^b NATIONAL TECHNICAL UNIVERSITY OF ATHENS   (Greece)

^c UNIVERSITY OF CRETE   (Greece)

Author keywords

Laser materials processing; Silicon microcones

Indexed keywords

IMAGING TECHNIQUES; LASER BEAM EFFECTS; MICROSTRUCTURE; MORPHOLOGY; PARAMETER ESTIMATION; SCANNING ELECTRON MICROSCOPY; ULTRAVIOLET RADIATION;

LASER MATERIALS PROCESSING; SILICON MICROCONES;

SILICON;

EID: 33646587056     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2005.07.120     Document Type: Article

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