Femtosecond laser-induced formation of submicrometer spikes on silicon in water

Applied Physics Letters

Volumn 85, Issue 23, 2004, Pages 5694-5696

  Shen, M Y ^a   Crouch, C H ^b   Carey, J E ^c   Mazur, E ^c  

^a HARVARD UNIVERSITY   (United States)

^b TOHOKU UNIVERSITY   (Japan)

^c SWARTHMORE COLLEGE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FEMTOSECOND; LASER-INDUCED ETCHING; SUBMICROMETER SPIKES; WAVELENGTHS;

CHEMICAL ANALYSIS; ETCHING; LASER BEAM EFFECTS; LASER PULSES; MICROMETERS; SCANNING ELECTRON MICROSCOPY; SURFACE PROPERTIES; VACUUM; WATER; X RAY PHOTOELECTRON SPECTROSCOPY;

SILICON;

EID: 12844278863     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1828575     Document Type: Article

References (17)

1. S. R. Foltyn, in Pulsed Laser Deposition of Thin Films, edited by D. B. Chrisey and G. K. Hubler (Wiley-Interscience, New York, 1994), pp. 89-113, and references therein.
2. T-H. Her, R. J. Finlay, C. Wu, S. Deliwala, and E. Mazur, Appl. Phys. Lett. 73, 1673 (1998)
3. A. J. Pedraza, J. D. Fowlkes, and D. H. Lowndes, Appl. Phys. Lett. 74, 2322 (1999).
4. S. I. Dolgaev, S. V. Lavrishev, A. A. Lyalin, A. V. Simakin, V. V. Voronov, and G. A. Shafeev, Appl. Phys. A: Mater. Sci. Process. 73, 177 (2001).
5. J. Carey, C. Crouch, R. Younkin, E. Mazur and M. Sheehy, in Proceedings of the 14th International Vacuum Microelectronics Conference, 2001, p. 75.
6. C. Wu, C. H. Crouch, L. Zhao, J. E. Carey, R. Younkin, J. A. Levinson, E. Mazur, R. M. Farrell, P. Gothoskar, and A. Karger, Appl. Phys. Lett. 78, 1850 (2001).
7. C. H. Crouch, M. Y. Shen, J. E. Carey, and E. Mazur, 2002 MRS Fall Meeting, Symposium KK 3.4, 2002.
8. M. Y. Shen, C. H. Crouch, J. E. Carey, R. Younkin, E. Mazur, M. Sheehy, and C. M. Friend, Appl. Phys. Lett. 82, 1715 (2003).
9. T.-H. Her, Ph.D. thesis. Harvard University, 1998.
10. G. Maatz, A. Heisterkamp, H. Lubatschowski, S. Barcikowski, C. Fallnich, H. Welling, and W. Ertmer, J. Opt. A, Pure Appl. Opt. 2, 59 (2000).
11. A. Ben-Yakar, R. L. Byer, A. Harkin, J. Ashmore, H. A. Stone, M. Shen, and E. Mazur, Appl. Phys. Lett. 83, 3030 (2003).
12. E. N. Glezer, C. B. Schaffer, N. Nishimura, and E. Mazur, Opt. Lett. 22, 1817 (1997).
13. C. B. Schaffer, N. Nishimura, E. N. Glezer, Albert M.-T. Kim, and E. Mazur, Opt. Express 10, 196 (2002).
14. J. E. Sipe, J. F. Young, J. S. Preston, and H. M. van Driel, Phys. Rev. B 27, 1141 (1983).
15. S. C. Hardy, J. Cryst. Growth 69, 456 (1984).
16. D. H. Lowndes, J. D. Fowlkes, and A. J. Pedraza, Appl. Surf. Sci. 154-155, 647 (2000).
17. -1 the penetration depth; from N. Bloembergen, in Laser-Solid Interactions and Laser Processing, edited by S. D. Ferris, H. J. Leamy, and J. M. Poate, AIP Conf. Proc. No. 50 (American Institute of Physics, New York, 1979), p. 1.