Investigation properties of Au-porous a-Si0.70C0.30 as humidity sensor

Sensors and Actuators, B: Chemical

Volumn 176, Issue , 2013, Pages 1183-1190

  Boukezzata, Assia ^a   Keffous, Aissa ^a   Nezzal, Ghania ^b   Gabouze, Noureddine ^a   Kechouane, Mohamed ^b   Zaafane, Kahina ^b   Hammouda, Amirouche ^b,c,d   Simon, Patrick ^c,d   Menari, Hamid ^a  

^a L'Unite de Developpement de la Technologie du Silicium   (Algeria)

^b UNIVERSITY OF SCIENCES AND TECHNOLOGY HOUARI BOUMEDIENE   (Algeria)

^c UPR 3079   (France)

^d UNIVERSITÉ D'ORLÉANS   (France)

Author keywords

Au electrodes; Electrochemical etching; Porous SiC; RH sensors

Indexed keywords

ANODIC OXIDATION; ATMOSPHERIC HUMIDITY; ELECTROCHEMICAL ELECTRODES; ELECTROCHEMICAL ETCHING; ELECTRODES; HUMIDITY SENSORS; HYDROFLUORIC ACID; MAGNETRONS; POROUS SILICON; SILICON; SILICON CARBIDE;

APPLIED BIAS VOLTAGE; APPLIED VOLTAGES; AU ELECTRODES; DC MAGNETRON CO-SPUTTERING; GOLD ELECTRODES; POROUS SIC; RESISTIVE HUMIDITY SENSOR; RH SENSORS;

AMORPHOUS SILICON;

EID: 84875479738     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2012.10.082     Document Type: Article

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