Humidity sensors using porous silicon layer with mesa structure

Journal of Physics D: Applied Physics

Volumn 33, Issue 15, 2000, Pages 1781-1784

  Kim, Seong Jeen ^a   Park, Jae Yoon ^a   Lee, Sang Hoon ^b   Yi, Seung Hwan ^c  

^a Kyungnam University   (South Korea)

^b Hanseo University   (South Korea)

^c University of Hawaii at Manoa   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE MEASUREMENT; ETCHING; HYDROMETERS; MOISTURE DETERMINATION; OXIDATION; POROUS SILICON;

HUMIDITY SENSORS;

SILICON SENSORS;

EID: 0034248122     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/33/15/305     Document Type: Article

References (8)

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