Microcantilevers with nanowells as moisture sensors

Sensors and Actuators, B: Chemical

Volumn 137, Issue 2, 2009, Pages 561-565

  Lee, Dongkyu ^a   Shin, Nayoung ^a   Lee, Kun Hong ^a   Jeon, Sangmin ^a  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

Author keywords

Anodic aluminum oxide; Microcantilever; Moisture sensors; Nanowells

Indexed keywords

ALUMINA; ALUMINUM; ATOMIC FORCE MICROSCOPY; CHEMICAL SENSORS; COMPOSITE MICROMECHANICS; MOISTURE METERS; NANOCANTILEVERS; NATURAL FREQUENCIES; OXIDES; SENSITIVITY ANALYSIS;

ANODIC ALUMINUM OXIDE; ANODIZATION; MICROCANTILEVER; MOISTURE CONCENTRATIONS; MOISTURE SENSORS; NANOWELLS; RESONANCE FREQUENCIES; SURFACE AREAS;

MOISTURE CONTROL;

EID: 62649096668     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2009.01.031     Document Type: Article

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