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Volumn 332, Issue 1-2, 1998, Pages 290-294

Raman microscopy study of pulsed laser ablation deposited silicon carbide films

b CNR (Italy)

Author keywords

Laser ablation; Raman scattering; Silicon carbide; Thin films

Indexed keywords

LASER ABLATION; PHONONS; PULSED LASER APPLICATIONS; RAMAN SCATTERING; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SILICON CARBIDE; THIN FILMS;

SILICON CARBIDE FILMS;

AMORPHOUS FILMS;

EID: 0032476252 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(98)00994-8 Document Type: Article

Times cited : (33)

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