Novel flexible resistive-type humidity sensor

Sensors and Actuators, B: Chemical

Volumn 123, Issue 2, 2007, Pages 1071-1076

  Su, Pi Guey ^a   Wang, Chao Shen ^a  

^a CHINESE CULTURE UNIVERSITY   (Taiwan)

Author keywords

Flexible humidity sensor; In situ co polymerization; Interface; Sensing properties; Substrate effect

Indexed keywords

ACTIVATION ENERGY; ALUMINA; COPOLYMERIZATION; INTERFACES (MATERIALS); POLYESTERS; SUBSTRATES;

IN SITU CO-POLYMERIZATION; LOGARITHMIC IMPEDANCE; SENSING PROPERTIES; SUBSTRATE EFFECT;

HUMIDITY SENSORS;

EID: 34247602501     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2006.11.015     Document Type: Article

References (24)

1. Yamazoe N., and Shimizu Y. Humidity sensors: principles and applications. Sens. Actuators 10 (1986) 379-398
2. Fagan J.G., and Amarakoon V.R.W. Reliability and reproducibility of ceramic sensors. Part III. Humidity sensors. Am. Soc. Bull. 72 (1993) 119-130
3. Kulwicki B.M. Humidity sensors. J. Am. Ceram. Soc. 74 (1991) 697-708
4. Przyluski J., and Wieczorek W. Proton polymeric electrolytes: a review. Synth. Met. 45 (1991) 323-333
5. Sakai Y., Sadaoka Y., and Matsuguchi M. Humidity sensors based on polymer thin films. Sens. Actuators B 35-36 (1996) 85-90
6. sakai Y., Matsuguchi M., and Hurukawa T. Humidity sensor using crosslinked poly(chloromethyl styrene). Sens. Actuators B 66 (2000) 135-138
7. Gong M.S., Rhee H.W., and Lee M.H. Humidity sensor using epoxy resin containing quaternary ammonium salts. Sens. Actuators B 73 (2001) 124-129
8. Li Y., Yang M.J., and She Y. Humidity sensors using in situ synthesized sodium polystyrenesulfonate/ZnO nanocomposites. Talanta 62 (2004) 707-712
9. Casalbore-Miceli G., Yang M., Li Y., Camaioni N., Martelli A., and Zanelli A. Effect of the doping level on the conductance of polymer-salts complexes in the presence of humidity. Sens. Actuators B 97 (2004) 362-368
10. Su P.G., and Uen C.L. In situ copolymerization of copolymer of methyl methacrylate and [3-(methacrylamino) propyl] trimethyl ammonium chloride on an alumina substrate for humidity sensing. Sens. Actuators B 107 (2005) 317-322
11. Sager K., Schroth A., Nakladal A., and Gerlach G. Humidity-dependent mechanical properties of polyimide films and their use for IC-compatible humidity sensors. Sens. Actuators A 53 (1996) 330-334
12. 2/Si sensor for low and medium humidity ranges. Sens. Actuators B 23 (1995) 177-180
13. Rittersma Z.M., and Benecke W. A humidity sensor featuring a porous silicon capacitor with an integrated refresh resistor. Sens. Mater. 12 (2000) 35-55
14. Rittersma Z.M., Splinter A., BÖdecker A., and Benecke W. A novel surface-micromachined capacitive porous silicon humidity sensor. Sens. Actuators B 68 (2000) 210-217
15. Lee C.Y., and Lee G.B. Micromachine-based humidity sensors with integrated temperature sensors for signal drift compensation. J. Micromech. Microeng. 13 (2003) 620-627
16. Connolly E.J., Pham H.T.M., Groeneweg J., Sarro P.M., and French P.J. Silicon caebide membrane relative humidity sensor with aluminium electrodes. Proceedings of the IEEE Micro Electro Mechanical System (MEMS) (2004) 193-196
17. Wang J., and Shi K. Study of polymer humidity sensor array on silicon wafer. J. Mater. Sci. 39 (2004) 3155-3157
18. Nilsson D., Chen M., Kugler T., Remonen T., Armgarth M., and Berggren M. Bi-stable and dynamic current modulation in electrochemical organic transistors. Adv. Mater. 14 (2002) 51-54
19. Nilsson D., Kugler T., Svensson P.O., and Berggren M. An all-organic sensor-transistor based on a novel electrochemical transducer concept printed electrochemical sensors on paper. Sens. Actuators B 86 (2002) 193-197
20. Su P.G., Chen I.C., and Wu R.J. Use of poly(2-acrylamido-2-methylpropane sulfonate) modified with tetraethyl orthosilicate as sensing material for measurement of humidity. Anal. Chim. Acta 449 (2001) 103-109
21. Su P.G., and Wu R.J. Uncertainty of humidity sensors testing by means of divided-flow generator. Measurement 36 (2004) 21-27
22. Casalbore-Miceli G., Camaioni N., Yang M.J., Zhen M., Zhan X.W., and D'Aprano A. Charge transport mechanism in pressed pellets of polymer proton conductors. Solid State Ionics 100 (1997) 217-224
23. Casalbore-Miceli G., Yang M.J., Camaioni N., Mari C.M., Li Y., Sun H., and Ling M. Investigations on the ion transport mechanism in conduction polymer films. Solid State Ionics 131 (2000) 311-321
24. Shackelford J.F. Introduction to Materials Science for Engineers (1992), Macmillan, New York pp. 138-157