High-performance capacitive humidity sensor based on silicon nanoporous pillar array

Thin Solid Films

Volumn 517, Issue 2, 2008, Pages 948-951

  Li, Long Yu ^a   Dong, Yong Fen ^a   Jiang, Wei Fen ^a   Ji, Hui Fang ^a   Li, Xin Jian ^a  

^a ZHENGZHOU UNIVERSITY   (China)

Author keywords

Capacitive humidity sensor; Humidity hysteresis; Response recovery time; Sensitivity; Silicon nanoporous pillar array (Si NPA)

Indexed keywords

ATMOSPHERIC HUMIDITY; ELASTICITY; HUMIDITY SENSORS; HYSTERESIS; METEOROLOGY; MOISTURE; PLANTS (BOTANY); SENSOR NETWORKS; SENSORS; SILICON;

CAPACITIVE HUMIDITY SENSOR; HUMIDITY HYSTERESIS; RESPONSE/RECOVERY TIME; SENSITIVITY; SILICON NANOPOROUS PILLAR ARRAY (SI-NPA);

HUMIDITY CONTROL;

EID: 55049090184     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2008.07.016     Document Type: Article

References (24)

1. Traversa E. Sens. Actuators B, Chem. 23 (1995) 135
2. Yuk J., and Troczynski T. Sens. Actuators B, Chem. 94 (2003) 290
3. Golonka L.J., Licznerski B.W., Nitsch K., and Teterycz H. Meas. Sci. Technol. 8 (1997) 92
4. Wang W.S., and Virkar A.V. Sens. Actuators B, Chem. 98 (2004) 282
5. Di Francia G., Castaldo A., Massera E., Nasti I., Quercia L., and Rea I. Sens. Actuators B, Chem. 111-112 (2005) 135
6. Rittersma Z.M., Splinter A., Bödecker A., and Benecke W. Sens. Actuators B, Chem. 68 (2000) 210
7. Fürjes P., Kovács A., Dücso C.s., Ádám M., Müller B., and Mescheder U. Sens. Actuators B, Chem. 95 (2003) 140
8. Baratto C., Faglia G., Comini E., Sberveglieri G., Taroni A., La Ferrara V., Quercia L., and Di Francia G. Sens. Actuators B, Chem. 77 (2001) 62
9. Foucaran A., Delannoy F.P., Giani A., Sackda A., Combette P., and Boyer A. Thin Solid Films, 297 (1997) 317
10. Beale M.I.J., Chew N.G., Uren M.J., Cullis A.G., and Benjamin J.D. Appl. Phys. Lett. 46 (1985) 86
11. Foll H., Christophersen M., Carstensen J., and Hasse G. Mater. Sci. Eng. R. 39 (2002) 93
12. Foucaran A., Sorli B., Garcia M., Pascal-Delannoy F., Giani A., and Boyer A. Sens. Actuators. 79 (2000) 189
13. Li X.J., Hu X., Jia Y., and Zhang Y.H. Appl. Phys. Lett. 75 (1999) 2906
14. Li X.J., Zhu D.L., Chen Q.W., and Zhang Y.H. Appl. Phys. Lett. 74 (1999) 389
15. Sundaran R., Raj E.S., and Nagaraja K.S. Sens. Actuators B, Chem. 99 (2004) 350
16. Agarwal S., and Sharma G.L. Sens. Actuators B, Chem. 85 (2002) 205
17. Kim S.J., Park J.Y., Lee S.H., and Yi S.H. J. Phys., D. Appl. Phys. 33 (2000) 1781
18. Cafferty E.M., and Zettlemoyer A.C. Discuss. Faraday Soc. 52 (1971) 239
19. Seiyama T., Yamazoe N., and Arai H. Sens. Actuators 4 (1983) 85
20. Wang H.Y., and Li X.J. Sens. Actuators B, Chem. 110 (2005) 260
21. Jiang W.F., Xiao S.H., Feng C.Y., Li H.Y., and Li X.J. Sens. Actuators B, Chem. 125 (2007) 651
22. Li G.Q., Lai P.T., Zeng S.H., Huang M.Q., and Li B. Sens. Actuators 75 (1999) 70
23. Wang C.T., and Wu C.L. Thin Solid Films 496 (2006) 658
24. Li G.Q., Lai P.T., Huang M.Q., Zeng S.H., Li B., and Cheng Y.C. J. Appl. Phys. 87 (2000) 8716