Accelerated resistive humidity sensing properties of silicon nanoporous pillar array

Thin Solid Films

Volumn 517, Issue 9, 2009, Pages 2994-2996

  Jiang, Wei Fen ^a   Jia, Min ^a   Wang, Yu Sheng ^a   Li, Long Yu ^b   Li, Xin Jian ^b  

^a NORTH CHINA INSTITUTE OF WATER CONSERVANCY AND HYDROELECTRIC POWER   (China)

^b ZHENGZHOU UNIVERSITY   (China)

Author keywords

Device response; Resistive humidity sensor; Silicon nanoporous pillar array (Si NPA)

Indexed keywords

ATMOSPHERIC HUMIDITY; CRYSTAL STRUCTURE; FREQUENCY RESPONSE; HUMIDITY CONTROL; HUMIDITY SENSORS; METEOROLOGY; MOISTURE; NONMETALS; PLANTS (BOTANY); SENSORS; SILICON; SINGLE CRYSTALS; STRUCTURE (COMPOSITION);

ALUMINIUM ELECTRODES; DEVICE RESPONSE; HUMIDITY SENSING PROPERTIES; HYDROTHERMALLY; INTERDIGITAL; NANO-POROUS STRUCTURES; ORDER OF MAGNITUDES; PILLAR ARRAYS; RELATIVE HUMIDITIES; RESISTIVE HUMIDITY SENSOR; RESPONSE TIME; SENSING AREAS; SILICON NANOPOROUS PILLAR ARRAY (SI-NPA); SINGLE CRYSTAL SILICONS; VAPOR TRANSPORTATIONS;

SILICON WAFERS;

EID: 60249091562     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2008.11.071     Document Type: Article

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