Structural and optical properties of a-Si 1-x C x :H films synthesized by dc magnetron sputtering technique

Applied Surface Science

Volumn 256, Issue 14, 2010, Pages 4591-4595

  Keffous, Aïssa ^a   Cheriet, Abdelhak ^a   Belkacem, Youcef ^a   Gabouze, Noureddine ^a   Boukezzata, Assia ^a   Boukennous, Yacine ^a   Brighet, Amer ^b   Cherfi, Rabah ^b   Kechouane, Mohamed ^b   Guerbous, Lakhdar ^c   Menous, Isa ^a   Menari, Hamid ^a  

^a L'Unite de Developpement de la Technologie du Silicium   (Algeria)

^b UNIVERSITY OF SCIENCES AND TECHNOLOGY HOUARI BOUMEDIENE   (Algeria)

^c CENTRE DE RECHERCHE NUCLÉAIRE D ALGER   (Algeria)

Author keywords

Amorphous film; Luminescence; Silicon carbide; SIMS; Sputtering; Structure

Indexed keywords

AMORPHOUS CARBON; AMORPHOUS SILICON; CARBON FILMS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HYDROGENATION; LUMINESCENCE; MAGNETRON SPUTTERING; MASS SPECTROMETRY; OPTICAL PROPERTIES; PHOTOLUMINESCENCE; SECONDARY ION MASS SPECTROMETRY; SILICON CARBIDE; SPUTTERING; STRUCTURE (COMPOSITION); TEMPERATURE; X RAY DIFFRACTION;

DC MAGNETRON SPUTTERING TECHNIQUE; DEPOSITED FILMS; IR SPECTROPHOTOMETRY; LOW TEMPERATURES; PHOTOLUMINESCENCE RESPONSE; SCANNING ELECTRONIC MICROSCOPY; SECONDARY IONS; STRUCTURAL AND OPTICAL PROPERTIES;

AMORPHOUS FILMS;

EID: 77950689978     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2010.02.054     Document Type: Article

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