Influence of AlN layers on mechanical properties and thermal stability of Cr-based nitride coatings

Thin Solid Films

Volumn 531, Issue , 2013, Pages 113-118

  Schlogl M ^a   Paulitsch, J ^a   Keckes, J ^a   Mayrhofer, P H ^a  

^a UNIVERSITY OF LEOBEN   (Austria)

Author keywords

Aluminum nitride; Chromium aluminum nitride; Chromium aluminum yttrium nitride; Chromium nitride; Hardness; Magnetron sputtering; Multilayer coatings; Thermal stability

Indexed keywords

ANNEALING TEMPERATURES; ANNEALING TREATMENTS; CHROMIUM ALUMINUM NITRIDE; CHROMIUM NITRIDE; HARDNESS INCREASE; MECHANICAL AND THERMAL PROPERTIES; MECHANICAL RESPONSE; MULTI-LAYER-COATING;

ALUMINUM; ALUMINUM COATINGS; ANNEALING; CHROMATE COATINGS; CHROMIUM; CHROMIUM COMPOUNDS; HARD COATINGS; HARDNESS; INDUSTRIAL APPLICATIONS; MAGNETRON SPUTTERING; MULTILAYERS; NITRIDES; THERMODYNAMIC STABILITY; ZINC SULFIDE;

ALUMINUM NITRIDE;

EID: 84875472846     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2012.12.057     Document Type: Article

References (61)

1. B. Navinšek, P. Panjan, and I. Milošev Surf. Coat. Technol. 97 1997 182
2. J.W. Seok, N.M. Jadeed, and R.Y. Lin Surf. Coat. Technol. 138 2001 14
3. B. Navinšek, and P. Panjan Surf. Coat. Technol. 74-75 1995 919
4. Y.L. Su, and S.H. Yao Wear 205 1997 112
5. W. Ernst, J. Neidhardt, H. Willmann, B. Sartory, P. Mayrhofer, and C. Mitterer Thin Solid Films 517 2008 568
6. P.H. Mayrhofer, C. Mitterer, and H. Clemens Adv. Eng. Mater. 7 2005 1071
7. P. Mayrhofer, F. Rovere, M. Moser, C. Strondl, and R. Tietema Scr. Mater. 57 2007 249
8. A. Kumar, H.L. Chan, J.J. Weimer, and L. Sanderson Thin Solid Films 309 1997 406
9. J.-E. Sundgren Thin Solid Films 128 1985 21
10. I. Petrov, L. Hultman, and J. Sundgren J. Vac. Sci. Technol., A 10 1992 265
11. J. Vetter Surf. Coat. Technol. 76-77 1995 719
12. O. Banakh Surf. Coat. Technol. 163-164 2003 57
13. Y. Otani, and S. Hofmann Thin Solid Films 287 1996 188
14. S. PalDey, and S.C. Deevi Mater. Sci. Eng. 342 2003 58
15. F. Rovere, and P.H. Mayrhofer J. Vac. Sci. Technol., A 25 2007 1336
16. Q. Yang, C. He, L.R. Zhao, and J.-P. Immarigeon Scr. Mater. 46 2002 293
17. J. Paulitsch, P.H. Mayrhofer, W.-D. Münz, and M. Schenkel Thin Solid Films 517 2008 1239
18. J. Lin, J.J. Moore, B. Mishra, M. Pinkas, and W.D. Sproul Surf. Coat. Technol. 204 2009 936
19. Y. Kim, T. Byun, and J. Han Superlattice Microstruct. 45 2009 73
20. S. Tien, and J. Duh Thin Solid Films 494 2006 173
21. B. Yang, L. Chen, K.K. Chang, W. Pan, Y.B. Peng, Y. Du, and Y. Liu Int. J. Refract. Met. Hard Mater. 35 2012 235
22. G. Kim, S. Lee, and J. Hahn Surf. Coat. Technol. 193 2005 213
23. K. Kutschej, P.H. Mayrhofer, M. Kathrein, P. Polcik, R. Tessadri, and C. Mitterer Surf. Coat. Technol. 200 2005 2358
24. H. Barshilia, N. Selvakumar, B. Deepthi, and K. Rajam Surf. Coat. Technol. 201 2006 2193
25. M. Brizuela, A. Garcia-Luis, I. Braceras, J.I. Oñate, J.C. Sánchez-López, D. Martínez-Martínez, C. López-Cartes, and A. Fernández Surf. Coat. Technol. 200 2005 192
26. A.E. Reiter, V.H. Derflinger, B. Hanselmann, T. Bachmann, and B. Sartory Surf. Coat. Technol. 200 2005 2114
27. J. Romero, M.A. Gómez, J. Esteve, F. Montalà, L. Carreras, M. Grifol, and A. Lousa Thin Solid Films 515 2006 113
28. M. Kawate, A. Kimura Hashimoto, and T. Suzuki Surf. Coat. Technol. 165 2003 163
29. J. Vetter, E. Lugscheider, and S.S. Guerreiro Surf. Coat. Technol. 98 1998 1233
30. M. Zhu, M. Li, and Y. Zhou Surf. Coat. Technol. 201 2006 2878
31. F. Rovere, P.H. Mayrhofer, A. Reinholdt, J. Mayer, and J.M. Schneider Surf. Coat. Technol. 202 2008 5870
32. J. Park, and Y. Baik Surf. Coat. Technol. 200 2005 1519
33. P.E. Hovsepian, and W.-D. Münz Vacuum 69 2002 27
34. Y.-C. Chan, H.-W. Chen, P.-S. Chao, J.-G. Duh, and J.-W. Lee Vacuum 87 2013 195
35. J. Lin, N. Zhang, Z. Wu, W.D. Sproul, M. Kaufman, M. Lei, J.J. Moore, Surf. Coat. Technol. (in press); http://dx.doi.org/10.1016/j.surfcoat.2011.11. 037.
36. M. Stueber, H. Holleck, H. Leiste, K. Seemann, S. Ulrich, and C. Ziebert J. Alloys Compd. 483 2009 321
37. U. Helmersson, S. Todorova, S.A. Barnett, J.-E. Sundgren, L.C. Markert, and J.E. Greene J. Appl. Phys. 62 1987 481
38. C.-L. Liang, G.-A. Cheng, R.-T. Zheng, and H.-P. Liu Thin Solid Films 520 2011 813
39. Y.H. Zhao, L. Hu, G.Q. Lin, J.Q. Xiao, C. Dong, and B.H. Yu Int. J. Refract. Met. Hard Mater. 32 2012 27
40. T.A. Rawdanowicz, V. Godbole, J. Narayan, J. Sankar, and A. Sharma Compos. Part B: Eng. 30 1999 657
41. J. Lao, Z. Han, J. Tian, and G. Li Mater. Lett. 58 2004 859
42. G.S. Kim, S.Y. Lee, and J.H. Hahn Surf. Coat. Technol. 171 2002 91
43. V. Braic, C.N. Zoita, M. Balaceanu, A. Kiss, A. Vladescu, A. Popescu, and M. Braic Surf. Coat. Technol. 204 2010 1925
44. M.-K. Wu, J.-W. Lee, Y.-C. Chan, H.-W. Chen, and J.-G. Duh Surf. Coat. Technol. 206 2011 1886
45. S. Inoue, F. Okada, and K. Koterazawa Vacuum 66 2002 227
46. P.H. Mayrhofer, G. Tischler, and C. Mitterer Surf. Coat. Technol. 142-144 2001 78
47. N. Christensen, and I. Gorczyca Phys. Rev. B 47 1993 4307
48. V. Chawla, D. Holec, and P.H. Mayrhofer J. Phys. D: Appl. Phys. 46 2013 045305
49. R.F. Zhang, and S. Veprek Acta Mater. 57 2009 2259
50. P.H. Mayrhofer, D. Music, and J.M. Schneider J. Appl. Phys. 100 2006 094906
51. W.C. Oliver, and G.M. Pharr J. Mater. Res. 7 1992 1564
52. J. Lin, J.J. Moore, B. Mishra, M. Pinkas, X. Zhang, and W.D. Sproul Thin Solid Films 517 2009 5798
53. Powder Diffraction File 03-065-2899 (fccCrN), 01-076-0702 (hcpAlN), International Center for Diffraction Data, PDF-2/Release, 2005.
54. Q. Li, I.W. Kim, S.A. Barnett, and L.D. Marks J. Mater. Res. 17 2002 1224
55. R. Daniel, K.J. Martinschitz, J. Keckes, and C. Mitterer Acta Mater. 58 2010 2621
56. M. Ohring The Material Science of Thin Films 1991 Academic Press San Diego, California
57. F. Rovere, and P.H. Mayrhofer J. Vac. Sci. Technol., A 26 2008 29
58. L. Spieß, G. Teichert, R. Schwarzer, H. Behnken, and C. Genzel Moderne Röntgenbeugung 2009 Vieweg+Teubner Wiesbaden
59. H. Willmann, P.H. Mayrhofer, L. Hultman, and C. Mitterer J. Mater. Res. 23 2011 2880
60. R. Rachbauer, S. Massl, E. Stergar, D. Holec, D. Kiener, J. Keckes, J. Patscheider, M. Stiefel, H. Leitner, and P.H. Mayrhofer J. Appl. Phys. 110 2011 023515
61. D. Rafaja, C. Wüstefeld, M. Dopita, V. Klemm, D. Heger, G. Schreiber, and M. Šíma Surf. Coat. Technol. 203 2008 572