Influence of bilayer period and thickness ratio on the mechanical and tribological properties of CrSiN/TiAlN multilayer coatings

Surface and Coatings Technology

Volumn 206, Issue 7, 2011, Pages 1886-1892

  Wu, Meng Ko ^a   Lee, Jyh Wei ^b   Chan, Yu Chen ^c   Chen, Hsien Wei ^c   Duh, Jenq Gong ^c  

^a TUNGNAN UNIVERSITY   (Taiwan)

^b MING CHI UNIVERSITY OF TECHNOLOGY   (Taiwan)

^c NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Bilayer period; CrSiN TiAlN multilayer coating; Fracture toughness; Pulsed DC reactive magnetron sputtering

Indexed keywords

BILAYER PERIOD; CRSIN/TIALN MULTILAYER COATING; CRYSTALLINE STRUCTURE; GLANCING ANGLE; LAYER THICKNESS; MAXIMUM HARDNESS; MECHANICAL AND TRIBOLOGICAL PROPERTIES; MICRO VICKERS HARDNESS; MULTI-LAYER-COATING; NANO-STRUCTURED; NANOINDENTERS; PIN ON DISK; PULSED DC; PULSED DC MAGNETRON SPUTTERING; THICKNESS RATIO; TOUGHNESS PROPERTIES; TRIBOLOGICAL PROPERTIES; WEAR TESTER; X RAY DIFFRACTOMETERS;

COATINGS; DC POWER TRANSMISSION; FILM PREPARATION; FRACTURE TOUGHNESS; MECHANICAL PROPERTIES; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY; TRIBOLOGY; VICKERS HARDNESS;

MULTILAYERS;

EID: 82755189485     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2011.07.045     Document Type: Article

References (22)

1. Holleck H. J. Vac. Sci. Technol., A 1986, 4:2661.
2. Helmersson U., Todorova S., Barnett S.A., Sundgren J.-E., Markert L.C., Greene J.E. J. Appl. Phys. 1987, 62:481.
3. Chu X., Barnett S.A. J. Appl. App. 1995, 77:4403.
4. Yashar P.C., Sproul W.D. Vacuum 1999, 55:179.
5. Vepřek S., Reiprich S. Thin Solid Films 1995, 268:64.
6. Vepřek S., Zhang R.F., Veprek-Heijman M.G.J., Sheng S.H., Argon A.S. Surf. Coat. Technol. 2010, 204:1898.
7. Lewis D.B., Wadsworth I., Münz W.-D., Kuzel R., Valvoda V. Surf. Coat. Technol. 1999, 116-119:284.
8. Wadsworth I., Smith I.J., Donohue L.A., Münz W.D. Surf. Coat. Technol. 1997, 94-95:315.
9. Barshilia Harish C., Surya Prakash M., Jain Anjana, Rajam K.S. Vacuum 2005, 77:169.
10. Kao C.M., Lee J.W., Chen H.W., Chan Y.C., Duh J.G., Chen S.P. Surf. Coat. Technol. 2010, 205:1438.
11. Jedrzejowski P., Klemberg-Sapieha J.E., Martinu L. Thin Solid Films 2003, 426:150.
12. Panjan M., Šturm S., Panjan P., Čekada M. Surf. Coat. Technol. 2008, 203:554.
13. Leyland A., Matthews A. Wear 2000, 246:1.
14. Koehler J.S. Phys. Rev. B 1970, 2:547.
15. Kato M., Mori T., Schwartz L.H. Acta Metall. 1980, 28:285.
16. Nordin M., Larsson M. Surf. Coat. Technol. 1999, 116-119:108.
17. Nordin M., Larsson M., Hogmark S. Wear 1999, 232:221.
18. Bull S.J., Jones A.M. Surf. Coat. Technol. 1996, 78:173.
19. Stueber M., Holleck H., Leiste H., Seemann K., Ulrich S., Ziebert C. J. Alloys Compd. 2009, 483:321.
20. Martinez E., Romero J., Lousa A., Esteve J. Surf. Coat. Technol. 2003, 163-164:571.
21. Luo Q., Rainforth W.M., Donohue L.A., Wadsworth I., Münz W.D. Vacuum 1999, 53:123.
22. Su Y.L., Yao S.H. Wear 1997, 205:112.