Thermal decomposition routes of CrN hard coatings synthesized by reactive arc evaporation and magnetron sputtering

Thin Solid Films

Volumn 517, Issue 2, 2008, Pages 568-574

  Ernst, W ^a   Neidhardt, J ^a   Willmann, H ^b   Sartory, B ^c   Mayrhofer, P H ^a   Mitterer, C ^a  

^a UNIVERSITY OF LEOBEN   (Austria)

^b MATERIALS CENTER LEOBEN FORSCHUNG GMBH   (Austria)

^c UNIVERSITY OF INNSBRUCK   (Austria)

Author keywords

CrN; Differential scanning calorimetry (DSC); Physical vapour deposition (PVD); Thermal stability

Indexed keywords

ANNEALING; CAVITY RESONATORS; CHROMATE COATINGS; CHROMIUM; COATINGS; DECOMPOSITION; DIFFERENTIAL SCANNING CALORIMETRY; EVAPORATION; LASER INTERFEROMETRY; MAGNETRON SPUTTERING; MAGNETRONS; MOISTURE; PHOTORESISTS; PLATING; PYROLYSIS; RATE CONSTANTS; REACTION KINETICS; THERMAL EVAPORATION; THERMOANALYSIS; VAPORS; X RAY DIFFRACTION ANALYSIS;

ANNEALING TEMPERATURES; ARC EVAPORATIONS; COATING MATERIALS; CRN; CRN COATINGS; DECOMPOSITION KINETICS; DECOMPOSITION REACTIONS; DEPOSITED COATINGS; HIGH-TEMPERATURE; IN-SITU; PHYSICAL VAPOUR DEPOSITION (PVD); REACTION STEPS; SIMULTANEOUS THERMAL ANALYSES; STRUCTURAL CHANGES; THERMAL ANALYSIS; THERMAL DECOMPOSITIONS; THERMAL STABILITY; X-RAY DIFFRACTIONS;

HARD COATINGS;

EID: 55049130083     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2008.06.086     Document Type: Article

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