Thermal stability and thermo-mechanical properties of magnetron sputtered Cr-Al-Y-N coatings

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 26, Issue 1, 2008, Pages 29-35

  Rovere, Florian ^a   Mayrhofer, Paul H ^a  

^a UNIVERSITY OF LEOBEN   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

MAGNETRON SPUTTERING; MECHANICAL PROPERTIES; MICROSTRUCTURAL EVOLUTION; STOICHIOMETRY; THERMODYNAMIC STABILITY; TRANSMISSION ELECTRON MICROSCOPY;

CR1-X ALX N COATINGS; MOLE FRACTIONS; THERMAL PROPERTIES;

COATING TECHNIQUES;

EID: 38049082268     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2806943     Document Type: Article

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