Nano-structured CrN/AlN multilayer coatings synthesized by pulsed closed field unbalanced magnetron sputtering

Surface and Coatings Technology

Volumn 204, Issue 6-7, 2009, Pages 936-940

  Lin, J ^a   Moore, J J ^a   Mishra, B ^a   Pinkas, M ^b   Sproul, W D ^a,c  

^a Department of Metallurgical and Materials Engineering   (United States)

^b NUCLEAR RESEARCH CENTER NEGEV   (Israel)

^c Reactive Sputtering INC   (United States)

Author keywords

CrAlN; CrN AlN; Multilayer coatings; Pulsed magnetron sputtering (PMS); Superlattice coatings; Wear

Indexed keywords

ALN; ALN LAYERS; BILAYER PERIOD; LOW COEFFICIENT OF FRICTION; LOW HARDNESS; MULTI-LAYER-COATING; NACL TYPE; NANO-STRUCTURED; POOR ADHESION; PULSED CLOSED-FIELD UNBALANCED MAGNETRON SPUTTERING; PULSED MAGNETRON SPUTTERING; STRUCTURE DIFFERENCE; SUPERHARDNESS; SUPERLATTICE COATINGS; TYPE STRUCTURES; WEAR RATES; WURTZITE TYPE; WURTZITE TYPE STRUCTURE;

ADHESION; CHROMIUM; CHROMIUM COMPOUNDS; HARDENING; HARDNESS; INORGANIC COATINGS; MAGNETRON SPUTTERING; MAGNETRONS; MULTILAYERS; OCEANOGRAPHIC EQUIPMENT; SEMICONDUCTING ALUMINUM COMPOUNDS; SODIUM CHLORIDE; SUPERLATTICES; WEAR RESISTANCE; ZINC SULFIDE;

CHROMATE COATINGS;

EID: 71849087610     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2009.04.013     Document Type: Article

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