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Thin Solid Films

Volumn 494, Issue 1-2, 2006, Pages 173-178

Effect of heat treatment on mechanical properties and microstructure of CrN/AlN multilayer coatings

(2) Tien, Shih Kang a Duh, Jenq Gong a

a NATIONAL TSING HUA UNIVERSITY (Taiwan)

Author keywords

AlN; CrN; Hard coating; Multilayer coating; Thermal stability

Indexed keywords

CHROMIUM COMPOUNDS; MICROHARDNESS; MICROSTRUCTURE; POLYCRYSTALLINE MATERIALS; PROGRAMMABLE LOGIC CONTROLLERS; PROTECTIVE COATINGS; RAPID THERMAL ANNEALING; SILICON; THERMODYNAMIC STABILITY; TRANSMISSION ELECTRON MICROSCOPY; ULTRAHIGH VACUUM; X RAY DIFFRACTION ANALYSIS;

A1N; CRN; HARD COATINGS; MULTILAYER COATINGS;

HEAT TREATMENT;

EID: 27944470543 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2005.08.198 Document Type: Conference Paper

Times cited : (53)

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