Fabrication and performance of TiN/TiAlN nanometer modulated coatings

Thin Solid Films

Volumn 520, Issue 2, 2011, Pages 813-817

  Liang, Chang Lin ^a,b   Cheng, Guo An ^a   Zheng, Rui Ting ^a   Liu, Hua Ping ^a  

^a BEIJING NORMAL UNIVERSITY   (China)

^b TSINGHUA UNIVERSITY   (China)

Author keywords

Nano modulated structure; Performances; Texture and composition; TiN TiAlN

Indexed keywords

ANTI-CORROSION; AR+ SPUTTERING; BILAYER PERIOD; CRITICAL LOAD; ELECTROCHEMICAL CORROSION TESTS; MODULATED STRUCTURES; MULTILAYERED COATINGS; NANO-MODULATED STRUCTURE; PERFORMANCES; PREFERRED ORIENTATIONS; PULSED VACUUM; SCANNING ELECTRON MICROSCOPES; SCRATCH TEST; SI(1 0 0); WAFER SUBSTRATES; X-RAY ENERGIES; X-RAY PHOTOELECTRON SPECTROSCOPE;

CRYSTAL ATOMIC STRUCTURE; ELECTROCHEMICAL CORROSION; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING SILICON COMPOUNDS; SILICON ALLOYS; SILICON WAFERS; TITANIUM NITRIDE; X RAY DIFFRACTION; X RAY DIFFRACTION ANALYSIS;

COATINGS;

EID: 80755190070     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2011.04.159     Document Type: Conference Paper

References (26)

1. J. Pelleg, L.Z. Zevin, S. Lungo, and N. Coritoru Thin Solid Films 197 1991 117
2. M.B. Takeyama, A. Noya, and K. Sakanishi J. Vac. Sci. Technol. B 18 3 2000 1333
3. I. Milošev, H.-H. Strehbtow, and B. Navinšek Thin Solid Films 303 1997 246
4. C. Liu, A. Leyland, Q. Bi, and A. Matthews Surf. Coat. Technol. 141 2001 164
5. V.N. Zhitomirsky, I. Grimberg, L. Rapoport, N.A. Travitzky, R.L. Boxman, S. Goldsmith, A. Raihel, I. Lapsker, and B.Z. Weiss Thin Solid Films 326 1998 134
6. N. Fateh, G.A. Fontalvo, G. Gassner, and C. Mitterer Wear 262 2007 1152
7. H. Ichimura, and A. Kawana J. Mater. Res. 8 1993 1093
8. J.H. Hsieh, C. Liang, C.H. Yu, and W. Wu Surf. Coat. Technol. 108-109 1998 132
9. M. Arndt, and H. Westphal Coatings in Manufacturing Processes 1-3 2008 151
10. S.J. Bull, D.G. Bhat, and M.H. Staia Surf. Coat. Technol. 163-164 2003 499
11. H.A. Jehn, and B. Rother Surf. Coat. Technol. 112 1999 103
12. J.S. Koehler Phys. Rev. B 215 1970 547
13. P.C. Yashar, and W.D. Sproul Vacuum 55 1999 179
14. K.N. Andersen, E.J. Bienk, K.O. Schweitz, H. Reitz, J. Chevallier, P. Kringhøj, and J. Bøttiger Surf. Coat. Technol. 123 2000 219
15. S.G. Harris, E.D. Doyle, A.C. Vlasveld, and P.J. Dolder Surf. Coat. Technol. 146-147 2001 305
16. E. Altuncu, and F. Üstel Mater. Manufacturing Processes 24 2009 796
17. A. Madan, P. Yashar, M. Shinn, and S.A. Barnett Thin Solid Films 302 1997 147
18. W.-D. Münz, L.A. Donohue, and P.Eh. Hovsepian Surf. Coat. Technol. 125 2000 269
19. H.C. Barshilia, K.S. Rajam, Jain Anjana, K. Gopinadhan, and Chaudhary Sujeet Thin Solid Films 503 2006 158
20. P.Eh. Hovsepian, D.B. Lewis, Q. Luo, W.-D. Münz, P.H. Mayrhofer, C. Mitterer, Z. Zhou, and W.M. Rainforth Thin Solid Films 485 2005 160
21. V. Braic, C.N. Zoita, M. Balaceanu, A. Kiss, A. Vladescu, A. Popescu, and M. Braic Surf. Coatings Technol. 204 2010 1925
22. W. Aperador, J.C. Caicedo, C. Espa, G. Cabrera, and C. Amaya J. Phys. Chem. Solids 71 2010 1754
23. N.J.M. Carvalho Thin Solid Films 429 2003 179
24. N.J.M. Carvalho, and J.Th.M. De Hosson Acta Materialia 54 2006 1857
25. R. Mientus, and K. Ellmer Surf. Coatings Technol. 116-119 1999 1093
26. C. Ducros, and F. Sanchette Surf. Coatings Technol. 201 2006 1045