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Volumn 200, Issue 5-6, 2005, Pages 1519-1523

The crystalline structure, hardness and thermal stability of AlN/CrN superlattice coating prepared by D.C. magnetron sputtering

(2) Park, Jong Keuk a Baik, Young Joon a

a Korea Institute of Science and Technology (South Korea)

Author keywords

AlN CrN; Hardness; Multilayer; Superlattice; Thermal stability

Indexed keywords

ALUMINUM COMPOUNDS; CHROMIUM COMPOUNDS; HARDNESS; HEAT TREATMENT; HIGH TEMPERATURE EFFECTS; MAGNETRON SPUTTERING; METALLIC SUPERLATTICES; MULTILAYERS; NANOSTRUCTURED MATERIALS; OXIDATION RESISTANCE; THERMODYNAMIC STABILITY;

BILAYER PERIOD; CRYSTALLINE STRUCTURE; MULTILAYERED SUPERLATTICE COATINGS;

INORGANIC COATINGS;

COATING;

EID: 28844464769 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2005.08.099 Document Type: Article

Times cited : (75)

References (20)

1
- 0028448363
- M. Zlatanoviéa D. Kakas Lj. Mazibrada A. Kunosiéa W.-D. Münz Surf. Coat. Technol. 64 1994 173
- (1994) Surf. Coat. Technol. , vol.64 , pp. 173
- Zlatanoviéa, M.¹ Kakas, D.² Mazibrada, Lj.³ Kunosiéa, A.⁴ Münz, W.-D.⁵

2
- 0030381667
- M.H. Staia E.S. Puchi D.B. Lewis J. Cawley D. Morel Surf. Coat. Technol. 86-87 1996 432
- (1996) Surf. Coat. Technol. , vol.86-87 , pp. 432
- Staia, M.H.¹ Puchi, E.S.² Lewis, D.B.³ Cawley, J.⁴ Morel, D.⁵

3
- 0033581059
- J. Stockemer R. Winand P. Vanden Brande Surf. Coat. Technol. 115 1999 230
- (1999) Surf. Coat. Technol. , vol.115 , pp. 230
- Stockemer, J.¹ Winand, R.² Vanden Brande, P.³

4
- 25544459890
- Wolf-Dieter Münz J. Vac. Sci. Technol., A, Vac. Surf. Films 21 1986 2717
- (1986) J. Vac. Sci. Technol., A, Vac. Surf. Films , vol.21 , pp. 2717
- Münz, W.-D.¹

5
- 0033509556
- K.-D. Bouzakis N. Vidakis N. Michailidis T. Leyendecker G. Erkens G. Fuss Surf. Coat. Technol. 120-121 1999 34
- (1999) Surf. Coat. Technol. , vol.120-121 , pp. 34
- Bouzakis, K.-D.¹ Vidakis, N.² Michailidis, N.³ Leyendecker, T.⁴ Erkens, G.⁵ Fuss, G.⁶

6
- 10044288664
- G. Erkens R. Cremer T. Hamoudi K.-D. Bouzakis I. Mirisidis S. Hadjiyiannis G. Skordaris A. Asimakopoulos S. Kombogiannis J. Anastopoulos K. Efstathiou Surf. Coat. Technol. 177-178 2004 727
- (2004) Surf. Coat. Technol. , vol.177-178 , pp. 727
- Erkens, G.¹ Cremer, R.² Hamoudi, T.³ Bouzakis, K.-D.⁴ Mirisidis, I.⁵ Hadjiyiannis, S.⁶ Skordaris, G.⁷ Asimakopoulos, A.⁸ Kombogiannis, S.⁹ Anastopoulos, J.¹⁰ Efstathiou, K.¹¹

7
- 21544437674
- U. Helmersson S. Todorova S.A. Barnett J.-E. Sundgren L.C. Markert J.E. Greene J. Appl. Phys. 62 1987 481
- (1987) J. Appl. Phys. , vol.62 , pp. 481
- Helmersson, U.¹ Todorova, S.² Barnett, S.A.³ Sundgren, J.-E.⁴ Markert, L.C.⁵ Greene, J.E.⁶

8
- 0027579598
- X. Chu S.A. Barnett M.S. Wong W.D. Sproul Surf. Coat. Technol. 57 1993 13
- (1993) Surf. Coat. Technol. , vol.57 , pp. 13
- Chu, X.¹ Barnett, S.A.² Wong, M.S.³ Sproul, W.D.⁴

9
- 0032394142
- P. Yashar S.A. Barnett J. Rechner W.D. Sproul J. Vac. Sci. Technol., A, Vac. Surf. Films 165 1998 2913
- (1998) J. Vac. Sci. Technol., A, Vac. Surf. Films , vol.165 , pp. 2913
- Yashar, P.¹ Barnett, S.A.² Rechner, J.³ Sproul, W.D.⁴

10
- 19244371383
- P.Eh. Hovsepian D.B. Lewis W.D. Münz S.B. Lyon M. Tomlinson Surf. Coat. Technol. 120-121 1999 535
- (1999) Surf. Coat. Technol. , vol.120-121 , pp. 535
- Hovsepian, P.Eh.¹ Lewis, D.B.² Münz, W.D.³ Lyon, S.B.⁴ Tomlinson, M.⁵

11
- 0036535005
- Do-Geun Kim Tae-Yeon Seong Young-Joon Baik Surf. Coat. Technol. 153 2000 79
- (2000) Surf. Coat. Technol. , vol.153 , pp. 79
- Kim, D.-G.¹ Seong, T.-Y.² Baik, Y.-J.³

12
- 0037428842
- Masahiro Kawate Ayako Kimura Hashimoto Tetsuya Suzuki Surf. Coat. Technol. 165 2003 163
- (2003) Surf. Coat. Technol. , vol.165 , pp. 163
- Kawate, M.¹ Hashimoto, A.K.² Suzuki, T.³

13
- 28844431689
- Volker Derflinger, Andreas Reiter, Chrisoph Gey, U.S. Pat. Publication Number 20050003239.
- U.S. Pat. Publication Number 20050003239
- Volker, D.¹ Andreas, R.² Chrisoph, G.³

14
- 0033325615
- P.Y. Yashar W.D. Sproul Vacuum 55 1999 179
- (1999) Vacuum , vol.55 , pp. 179
- Yashar, P.Y.¹ Sproul, W.D.²

15
- 0000474762
- I.W. Kim Quan Li L.D. Marks S.A. Barnett Appl. Phys. Lett. 78 2001 892
- (2001) Appl. Phys. Lett. , vol.78 , pp. 892
- Kim, I.W.¹ Quan, L.² Marks, L.D.³ Barnett, S.A.⁴

16
- 6244305376
- A. Mandan I.W. Kim S.C. Cheng P. Yashar V.P. Dravid S.A. Barnett Phys. Rev. Lett. 78 1997 1743
- (1997) Phys. Rev. Lett. , vol.78 , pp. 1743
- Mandan, A.¹ Kim, I.W.² Cheng, S.C.³ Yashar, P.⁴ Dravid, V.P.⁵ Barnett, S.A.⁶

17
- 33847502370
- Eric E. Fullerton Ivan K. Schuller H. Vanderstraeten Y. Bruynseraede Phys. Rev., B 45 1992 9292
- (1992) Phys. Rev., B , vol.45 , pp. 9292
- Fullerton Eric, E.¹ Schuller Ivan, K.² Vanderstraeten, H.³ Bruynseraede, Y.⁴

18
- 21544460243
- Xi Chu Scott A. Barnett J. Appl. Phys. 77 1995 4403
- (1995) J. Appl. Phys. , vol.77 , pp. 4403
- Chu, X.¹ Barnett, S.A.²

19
- 0343754503
- Academic New York
- M. Murakami A. Segmüller K.N. Tu Analytical Techniques for Thin Films vol. 27 1988 Academic New York 201
- (1988) Analytical Techniques for Thin Films , vol.27 , pp. 201
- Murakami, M.¹ Segmüller, A.² Tu, K.N.³

20
- 0038613513
- Q. Yang L.R. Zhao J. Vac. Sci. Technol., A, Vac. Surf. Films 21 3 2003 558
- (2003) J. Vac. Sci. Technol., A, Vac. Surf. Films , vol.21 , Issue.3 , pp. 558
- Yang, Q.¹ Zhao, L.R.²

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