Mechanical property investigation of AlN/VN nanomultilayers with microindentation technique

Materials Letters

Volumn 58, Issue 6, 2004, Pages 859-862

  Lao, Jijun ^a   Han, Zenghu ^a   Tian, Jiawan ^a   Li, Geyang ^a  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

Author keywords

Nanomultilayers; Superhardness effect; Supermodulus effect; Two step penetration method

Indexed keywords

ALUMINUM NITRIDE; APPROXIMATION THEORY; CRYSTAL GROWTH; CRYSTAL MICROSTRUCTURE; CURVE FITTING; DEFORMATION; ELASTIC MODULI; HARDNESS; INDENTATION; NANOSTRUCTURED MATERIALS; POLYCRYSTALLINE MATERIALS; STRAIN; STRESS ANALYSIS; SUBSTRATES; THICKNESS MEASUREMENT; VANADIUM COMPOUNDS;

NANOMULTILAYERS; SUPERHARDNESS EFFECT; SUPERMODULUS EFFECT; TWO-STEP PREPARATION METHOD;

MULTILAYERS;

EID: 0348231876     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matlet.2003.07.027     Document Type: Article

References (10)

1. Koehler J.S. Phys. Rev., B. 2:1977;547-551.
2. Cammarata R.C., Schlesinger T.E., et al. Appl. Phys. Lett. 56(19):1990;1862-1864.
3. Lehoczky S.L. J. Appl. Phys. 49:1978;5479-5485.
4. Shinn M., Hultman L., Barnett S.A. J. Mater. Res. 7(4):1992;901-911.
5. Helmersson U., Todorava S., Barnett S.A., et al. J. Appl. Phys. 62(2):1987;481-484.
6. Baral D., Ketterson J.B., Hilliard J.E. J. Appl. Phys. 57(4):1985;1076-1083.
7. Sundgren J.E., Hentzell H.T.G. J. Vac. Sci. Technol., A. 4(5):1986;2259-2279.
8. Vepřek S. J. Vac. Sci. Technol., A. 17(5):1999;2401-2420.
9. Jönsson B., Hogmark S. Thin Solid Films. 114:1984;257-269.
10. Oliver W.C., Pharr G.M. J. Mater. Res. 7(6):1992;1564-1583.