CrAlN coatings deposited by cathodic arc evaporation at different substrate bias

Thin Solid Films

Volumn 515, Issue 1, 2006, Pages 113-117

  Romero, J ^a   Gomez M A ^a,b   Esteve, J ^a   Montala F ^c   Carreras, L ^c   Grifol, M ^c   Lousa, A ^a  

^a UNIVERSITY OF BARCELONA   (Spain)

^b UNIVERSIDAD DE ANTIOQUIA   (Colombia)

^c TTC SA   (Spain)

Author keywords

Arc deposition; Hard coatings; Ion bombardment; Nitrides; Wear

Indexed keywords

ARC DEPOSITION; CATHODIC ARC EVAPORATION (CAE); HARD COATINGS; WEAR COEFFICIENT;

CRYSTAL STRUCTURE; DEPOSITION; GROWTH (MATERIALS); HARDENING; ION BOMBARDMENT; NITRIDES; WEAR OF MATERIALS;

PROTECTIVE COATINGS;

EID: 33749984274     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.01.061     Document Type: Article

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