CrN/AlN superlattice coatings synthesized by pulsed closed field unbalanced magnetron sputtering with different CrN layer thicknesses

Thin Solid Films

Volumn 517, Issue 20, 2009, Pages 5798-5804

  Lin, Jianliang ^a   Moore, John J ^a   Mishra, Brajendra ^a   Pinkas, Malki ^b   Zhang, Xuhai ^a   Sproul, William D ^c  

^a Department of Metallurgical and Materials Engineering   (United States)

^b NUCLEAR RESEARCH CENTER NEGEV   (Israel)

^c Reactive Sputtering INC   (United States)

Author keywords

CrAlN; CrN AlN; Pulsed magnetron sputtering; Superlattice coatings; Wear

Indexed keywords

CRALN; CRN/ALN; PULSED MAGNETRON SPUTTERING; SUPERLATTICE COATINGS; WEAR;

ALUMINUM; CHROMIUM; CHROMIUM COMPOUNDS; HARDENING; INORGANIC COATINGS; MAGNETRON SPUTTERING; MAGNETRONS; PHASE INTERFACES; SUPERLATTICES; TRANSMISSION ELECTRON MICROSCOPY; TUNGSTEN CARBIDE;

CHROMATE COATINGS;

EID: 66949172398     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.02.136     Document Type: Article

References (37)

1. Sproul W.D. Science 273 (1996) 889
2. Koehler J.S. Phys. Rev., B 2 (1970) 547
3. Yashar P.C., and Sproul W.D. Vacuum 55 (1999) 179
4. Shih K.K., and Dove D.B. Appl. Phys. Lett. 61 (1992) 654
5. Kot M., Rakowski W.A., Major L., Major R., and Morgiel J. Surf. Coat. Technol. 202 (2008) 3501
6. Helmersson U., Todorova S., Barnett S.A., Sundgren J.E., Markert L.C., and Greene J.E. J. Appl. Phys. 62 (1987) 481
7. Cameron D.C., Aimo R., Wang Z.H., and Pischow K.A. Surf. Coat. Technol. 142/144 (2001) 567
8. Larsson M., Hollman P., Hedenqvist P., Hogmark S., Wahlström U., and Hultman L. Surf. Coat. Technol. 86/87 (1996) 351
9. Hubbard K.M., Jervis T.R., Mirkarimi P.B., and Barnett S.C. J. Appl. Phys. 72 9 (1992) 4466
10. Mirkarimi P.B., Barnett S.A., Hubbard K.M., Jervis T.R., and Hultman L. J. Mater. Res. 9 6 (1994) 1456
11. Chu X., and Barnett S.A. J. Appl. Phys. 77 9 (1995) 4403
12. Kato M., Mori T., and Schwartz L.H. Acta Metall. 28 (1980) 285
13. Lehoczky S.L. J. Appl. Phys. 49 11 (1978) 5479
14. Ducros C., and Sanchette F. Surf. Coat. Technol. 201 (2006) 1045
15. Tomlinson M., Lyon S.B., Hovsepian P.Eh., and Münz W.D. Vacuum 53 (1999) 117
16. Hovsepian P.Eh., and Münz W.D. Vacuum 69 (2003) 27
17. Hovsepian P.Eh., Lewis D.B., Luo Q., Münz W.D., Mayrhofer P.H., Mitterer C., Zhou Z., and Rainforth W.M. Thin Solid Films 485 (2005) 160
18. Lin J., Mishra B., Moore J.J., and Sproul W.D. Surf. Coat. Technol. 201 (2006) 4329
19. Bobzin K., Lugscheider E., Nickel R., Bagcivan N., and Kramer A. Wear 263 (2007) 1274
20. Bobzin K., Lugscheider E., Maes M., Gold P.W., Loos J., and Kuhn M. Surf. Coat. Technol. 188/189 (2004) 649
21. Romero J., Gómez M.A., Esteve J., Montalà F., Carreras L., Grifol M., and Lousa A. Thin Solid Films 515 (2006) 113
22. Willmann H., Beckers M., Birch J., Mayrhofer P.H., Mitterer C., and Hultman L. Thin Solid Films 517 (2008) 598
23. Kim G.S., Lee S.Y., Hahn J.H., and Lee S.Y. Surf. Coat. Technol. 171 (2003) 91
24. Park J.-K., and Baik Y.-J. Surf. Coat. Technol. 200 (2005) 1519
25. Tien S.-K., Duh J.-G., and Lee J.-W. Surf. Coat. Technol. 201 (2007) 5138
26. Bardi U., Chenakin S.P., Ghezzi F., Giolli C., Goruppa A., Lavacchi A., Miorin E., Pagura C., and Tolstogouzov A. Appl. Surf. Sci. 252 (2005) 1339
27. Lin J., Moore J.J., Mishra B., Pinks M., Sproul W.D., and Rees J.A. Surf. Coat. Technol. 202 (2008) 1418
28. Perry A.J., Sue J.A., and Martin P.J. Surf. Coat. Technol. 81 (1996) 17
29. Noyan I.C., and Cohen J.B. Residual Stress Measurement by Diffraction and Interpretation (1987), Springer-Verlag, New York
30. In: Brundle C.R., Evans Jr. C.A., Wilson S., and Fitzpatrick L.E. (Eds). Encyclopedia of Materials Characterization: Surfaces, Interfaces, Thin Films (1992), Butterworth-Heinemann, Woburn, MA 120-121
31. Turkdogan E.T., and Ignatowicz S. J. Iron Steel Inst., London 188 (1958) 242 JCPDS 11-0065
32. Swanson H.E., Fuyat R.K., and Ugrinic G.M. Standard X-ray Diffraction Powder Patterns. Natl. Bur. Stand. Circ. 539 (1955) V20 JCPDS 06-0694
33. Holleck H., and Schier V. Surf. Coat. Technol. 76 (1995) 328
34. Lewis D.B., Wadsworth I., Münz W.D., Kuzel Jr. R., and Valvoda V. Surf. Coat. Technol. 116/119 (1999) 284
35. Zhang S., Sun D., Fu Y., and Du H. Surf. Coat. Technol. 198 (2005) 2
36. Matthews A., Franklin S., and Holmberg K. J. Phys., D, Appl. Phys. 40 (2007) 5463
37. Musil J., and Jirout M. Surf. Coat. Technol. 201 (2007) 5148