Carbon as a MEMS material: micro and nanofabrication of pyrolysed photoresist carbon

International Journal of Manufacturing Technology and Management

Volumn 13, Issue 2-4, 2008, Pages 360-375

  Wang, Chunlei ^a   Rabih, Zaouk ^b   Park, Benjamin Y ^b   Madou, Marc J ^b  

^a Florida International University   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

carbon; fabrication; MEMS; microbattery; microelectromechanical systems; nanoelectromechanical systems; NEMS; photoresist

Indexed keywords

EID: 84875433150     PISSN: 13682148     EISSN: None     Source Type: Journal    
DOI: 10.1504/IJMTM.2008.016782     Document Type: Article

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