Design of MEMS-tunable novel monolithic optical filters in InP with horizontal bragg mirrors

Solid-State Electronics

Volumn 48, Issue 10-11 SPEC. ISS., 2004, Pages 1959-1963

  Datta, Madhumita ^a,b   Pruessner, Marcel W ^a,b   Kelly, Daniel P ^a,b   Ghodssi, Reza ^a,b  

^a UNIVERSITY OF MARYLAND   (United States)

^b LABORATORY FOR PHYSICAL SCIENCES   (United States)

Author keywords

Coarse wavelength division multiplexing (CWDM); Distributed bragg reflector (DBR) mirrors; InP micro opto electro mechanical systems (MOEMS); Micromachined suspension beams; Parallel plate electrostatic actuators; Tunable optical filters

Indexed keywords

BANDWIDTH; FINITE ELEMENT METHOD; MICROACTUATORS; MICROELECTRODES; MICROMACHINING; MIRRORS; OPTICAL FILTERS; REFLECTION; SEMICONDUCTING INDIUM PHOSPHIDE; WAVELENGTH DIVISION MULTIPLEXING;

COARSE WAVELENGTH DIVISION MULTIPLEXING (CWDM); DISTRIBUTED BRAGG REFLECTOR (DBR) MIRRORS; INP MICRO-OPTO-ELECTRO-MECHANICAL SYSTEMS (MOEMS); MICROMACHINED SUSPENSION BEAMS; PARALLEL-PLATE ELECTROSTATIC ACTUATORS; TUNABLE OPTICAL FILTERS;

MICROELECTROMECHANICAL DEVICES;

EID: 3142712561     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sse.2004.05.042     Document Type: Conference Paper

References (6)

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