Electrochemical studies of carbon films from pyrolyzed photoresist

Journal of the Electrochemical Society

Volumn 145, Issue 7, 1998, Pages 2314-2319

  Kim, J ^a,c   Song, X ^a   Kinoshita, K ^a,c   Madou, M ^b,c   White, R ^b  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c ELECTROCHEMICAL SOCIETY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; CATALYSIS; COMPOSITION EFFECTS; CYCLIC VOLTAMMETRY; ELECTRIC CONDUCTIVITY MEASUREMENT; IRON COMPOUNDS; PHOTORESISTS; PYROLYSIS; REACTION KINETICS; SILICON WAFERS; THERMOGRAVIMETRIC ANALYSIS; TRANSMISSION ELECTRON MICROSCOPY;

CARBON FILMS; ELECTROCATALYSIS;

ELECTROCHEMICAL ELECTRODES;

EID: 0032121604     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1838636     Document Type: Article

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