Fabrication of nanometer-sized structures by C-NEMS technology

2005 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2005 Technical Proceedings

Volumn , Issue , 2005, Pages 151-154

  Ma, Kuo Sheng ^a   Jia, Guangyao ^a   Xu, Qingzhou ^a   Zhou, Hong ^a   Wang, Chunlei ^a   Zoval, Jim ^a   Madou, Marc ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Carbon NEMS; Electron beam lithography (EBL); Nano wires; SU 8

Indexed keywords

CARBON NEMS; NANOWIRES; SU-8;

CARBON; ELECTRON BEAM LITHOGRAPHY; ELECTRONIC EQUIPMENT; LSI CIRCUITS; PYROLYSIS; SYNTHESIS (CHEMICAL); THIN FILMS;

NANOSTRUCTURED MATERIALS;

EID: 32144437658     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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