Fabrication and characterization of aluminum thin film heaters and temperature sensors on a photopolymer for lab-on-chip systems

Sensors and Actuators, A: Physical

Volumn 193, Issue , 2013, Pages 170-181

  Martinez Quijada, J ^a   Caverhill Godkewitsch, S ^a   Reynolds, M ^a   Gutierrez Rivera, L ^a   Johnstone, R W ^b   Elliott, D G ^a   Sameoto, D ^a   Backhouse, C J ^c  

^a UNIVERSITY OF ALBERTA   (Canada)

^b Teledyne DALSA   (Canada)

^c UNIVERSITY OF WATERLOO   (Canada)

Author keywords

Adhesion; Aluminum; Heater; KMPR; Polymer; Sensor

Indexed keywords

ALUMINUM THIN FILMS; CORROSION-RESISTANT; FABRICATION AND CHARACTERIZATIONS; FABRICATION METHOD; HEATER; KMPR; LAB-ON-CHIP SYSTEMS; METAL LAYER; NON-POLYMERIC; POLYMER LAYERS; POLYMER MICROSTRUCTURES; POLYMER STRUCTURE; POLYMERIC DEVICES; RELIABLE METHODS; STABLE METALS; THERMALLY STABLE;

ADHESION; ALUMINUM; EMBEDDED SYSTEMS; LAB-ON-A-CHIP; METALLIC FILMS; POLYMERASE CHAIN REACTION; POLYMERS; SENSORS; STRUCTURES (BUILT OBJECTS); TEMPERATURE SENSORS;

FABRICATION;

EID: 84874034698     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2013.01.035     Document Type: Article

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