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Volumn 20, Issue 1, 2002, Pages 112-116
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Investigation of Pt/Ti bilayer on SiNx/Si substrates for thermal sensor applications
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Author keywords
[No Author keywords available]
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Indexed keywords
ADHESION;
COMPRESSIVE STRESS;
ELECTRON BEAMS;
ETCHING;
EVAPORATION;
PLATINUM;
SENSORS;
SILICON NITRIDE;
SILICON WAFERS;
SPUTTERING;
TENSILE STRESS;
TITANIUM;
ADHESION STRENGTH;
ADHESIVE TAPE TEST;
BILAYER;
ELECTRON BEAM EVAPORATION;
HIGH TEMPERATURE COEFFICIENT OF RESISTANCE;
PLATINUM THIN FILM;
STRESS CHARACTERIZATION;
THERMAL SENSOR;
TITANIUM THIN FILM;
VACUUM ANNEALING;
THIN FILMS;
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EID: 0036163158
PISSN: 07342101
EISSN: None
Source Type: Journal
DOI: 10.1116/1.1424272 Document Type: Article |
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Times cited : (13)
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References (14)
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