Microstenciling: A generic technology for microscale patterning of vapor deposited materials

Journal of Microelectromechanical Systems

Volumn 13, Issue 6, 2004, Pages 956-962

  Graff, Mason ^a   Mohanty, Swomitra K ^a   Moss, Eileen ^a   Frazier, A Bruno ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Metallization; Microstenciling; Microsystems; Thin film deposition

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DIELECTRIC MATERIALS; FABRICATION; GLASS; GOLD; METALLIZING; PHYSICAL VAPOR DEPOSITION; PLASMA ETCHING; POLYMERS; SILICON; SUBSTRATES; TITANIUM;

MICROSCALE PATTERNING; MICROSTENCILING; MICROSYSTEMS; THIN FILM DEPOSITION;

PRINTED CIRCUIT BOARDS;

EID: 10944242323     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2004.838368     Document Type: Article

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