Mechanical characterization of KMPR by nano-indentation for MEMS applications

Strain

Volumn 44, Issue 3, 2008, Pages 267-271

  Ou, K S ^a   Yan, H Y ^a   Chen, K S ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

Hardness; KMPR; Modulus; Nanoindentation

Indexed keywords

ANISOTROPY; ELASTIC MODULI; HARDNESS; HEAT TREATMENT; INDENTATION; PHOTORESISTS; TENSILE TESTING;

PILE-UP EFFECT; UNIAXIAL TENSILE TEST; VIBRATION TEST;

MEMS;

EID: 43749108101     PISSN: 00392103     EISSN: 14751305     Source Type: Journal    
DOI: 10.1111/j.1475-1305.2007.00367.x     Document Type: Conference Paper

References (8)

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