Experimental study of heat-treated thin film Ti/Pt heater and temperature sensor properties on a Si microfluidic platform

Journal of Micromechanics and Microengineering

Volumn 21, Issue 2, 2011, Pages

  Resnik, D ^a   Vrtacnik D ^a   Mozek M ^a   Pecar B ^a   Amon, S ^a  

^a UNIVERSITY OF LJUBLJANA   (Slovenia)

Author keywords

[No Author keywords available]

Indexed keywords

ADDITIONAL INSULATION; AFM; ANNEALED LAYERS; ANNEALING TEMPERATURES; CONTROLLED HEATING; DC SPUTTERING; ELECTRICAL PROPERTY; EXPERIMENTAL STUDIES; GRAIN GROWTH PROCESS; LIFT-OFF PROCESS; MICRO-FLUIDIC REACTORS; MICROFLUIDIC PLATFORMS; MICROSTRUCTURAL ANALYSIS; POWER CONSUMPTION; PYREX GLASS; RECRYSTALLIZATIONS; TEMPERATURE COEFFICIENT OF RESISTANCE; TEMPERATURE RANGE; THERMAL CHARACTERIZATION; THERMAL-ANNEALING; TIME RESPONSE;

ANNEALING; DC POWER TRANSMISSION; ELECTRIC PROPERTIES; ELECTRIC REACTORS; FABRICATION; GRAIN GROWTH; HEATING; IMPACT RESISTANCE; MICROFLUIDICS; SILICON; TEMPERATURE SENSORS; THIN FILMS;

THERMAL INSULATION;

EID: 79551699979     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/2/025025     Document Type: Article

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