A polymer-based microfluidic platform featuring on-chip actuated hydrogel valves for disposable applications

Journal of Microelectromechanical Systems

Volumn 19, Issue 4, 2010, Pages 944-950

  Geiger, Emil J ^a,b   Pisano, Albert P ^a   Svec, Frantisek ^c  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

^c LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

Hydrogel; injection molding; microfluidics; valve

Indexed keywords

ELECTRICAL CONTROLLER; EXTERNAL PRESSURES; FLUIDIC INTERCONNECTS; HEAT SOURCES; LARGE PORES; LOWER CRITICAL SOLUTION TEMPERATURE; METAL LAYER; MICRO-FLUIDIC DEVICES; MICRO-HEATERS; MICROFLUIDIC PLATFORMS; MONOLITHICALLY INTEGRATED; OFF-CHIP; ON CHIPS; PLASTIC INJECTION; ROOM TEMPERATURE;

FUNCTIONAL POLYMERS; HYDROGELS; MICROFLUIDICS; MOLDS; MONOLITHIC INTEGRATED CIRCUITS; VALVES (MECHANICAL);

INJECTION MOLDING;

EID: 77955414265     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2010.2048702     Document Type: Article

References (58)

1. H. Becker and C. Gärtner, "Polymer microfabrication methods for microfluidic analytical applications," Electrophoresis, vol.21, no.1, pp. 12-26, Jan. 2000.
2. H. Becker and L. E. Locascio, "Polymer microfluidic devices," Talanta, vol.56, no.2, pp. 267-287, Feb. 2002.
3. J. Ducree, R. Zengerle, J. Newman, H. Earnst, K. Riedmuller, S. Messner, G. Andrieux, M. Provence, and J. Eloy, "Flowmap microfluidics roadmap for the life sciences," FlowMap Consortium and EC, 2004.
4. E. Geiger, D. A. Mair, A. P. Pisano, and F. Svec, "On chip actuation of thermally sensitive hydrogel valve," in Proc. μTAS, 2008, pp. 1678-1680.
5. J. R. Webster, M. A. Burns, D. T. Burke, and C. H. Mastrangelo, "An inexpensive plastic technology for microfabricated capillary electrophoresis chips," in Proc. μTAS, 1998, pp. 249-252.
6. E. Verpoorte, "Microfluidic chips for clinical and forensic analysis," Electrophoresis, vol.23, no.5, pp. 677-712, Mar. 2002.
7. J. Wang, Z. Chen, P. L. A. M. Corstjens, M. G. Mauk, and H. H. Bau, "A disposable microfluidic cassette for DNA amplification and detection," Lab Chip, vol.6, no.1, pp. 46-53, Jan. 2006.
8. D. S. Kim, S. H. Lee, C. H. Ahn, J. Y. Lee, and T. H. Kwon, "Disposable integrated microfluidic biochip for blood typing by plastic microinjection moulding," Lab Chip, vol.6, no.6, pp. 794-802, Jun. 2006.
9. H. Lee, Y. Liu, D. Ham, and R. M. Westervelt, "Integrated cell manipulation system\CMOS/microfluidic hybrid," Lab Chip, vol.7, no.3, pp. 331-337, Mar. 2007.
10. S. Qi, X. Liu, S. Ford, J. Barrows, G. Thomas, K. Kelly, A. McCandless, K. Lian, J. Goettert, and S. A. Soper, "Microfluidic devices fabricated in poly (methyl methacrylate) using hot-embossing with integrated sampling capillary and fiber optics for fluorescence detection," Lab Chip, vol.2, no.2, pp. 88-95, May 2002.
11. J. Kameoka, H. G. Craighead, H. Zhang, and J. Henion, "A polymeric microfluidic chip for CE/MS determination of small molecules," Anal. Chem., vol.73, no.9, pp. 1935-1941, May 2001.
12. Y. Yang, C. Li, J. Kameoka, K. H. Lee, and H. G. Craighead, "A polymeric microchip with integrated tips and in situ polymerized monolith for electrospray mass spectrometry," Lab Chip, vol.5, no.8, pp. 869-876, Aug. 2005.
13. R. H. Liu, J. Yang, R. Lenigk, J. Bonanno, and P. Grodzinski, "Self-contained, fully integrated biochip for sample preparation, polymerase chain reaction amplification, and DNA microarray detection," Anal. Chem., vol.76, no.7, pp. 1824-1831, Apr. 2004.
14. G. T. Roman and R. T. Kennedy, "Fully integrated microfluidic separations systems for biochemical analysis," J. Chromatogr. A, vol. 1168, no. 1/2, pp. 170-188, Oct. 2007.
15. T. Thorsen, S. J. Maerkl, and S. R. Quake, "Microfluidic large-scale integration," Science, vol.298, no.5593, pp. 580-584, Oct. 2002.
16. J. S. Marcus, W. F. Anderson, and S. R. Quake, "Microfluidic single-cell mRNA isolation and analysis," Anal. Chem., vol.78, no.9, pp. 3084-3089, May 2006.
17. F. K. Balagadde, L. You, C. L. Hansen, F. H. Arnold, and S. R. Quake, "Long-term monitoring of bacteria undergoing programmed population control in a microchemostat," Science, vol.309, no.5731, pp. 137-140, Jul. 2005.
18. H. Andersson and A. van den Berg, "Microfluidic devices for cellomics: A review," Sens. Actuators B, Chem., vol.92, no.3, pp. 315-325, Jul. 2003.
19. M. W. Toepke and D. J. Beebe, "PDMS absorption of small molecules and consequences in microfluidic applications," Lab Chip, vol.6, no.12, pp. 1484-1486, Dec. 2006.
20. H. Becker and C. Gärtner, "Polymer microfabrication technologies for microfluidic systems," Anal. Bioanal. Chem., vol.390, no.1, pp. 89-111, Jan. 2008.
21. M. Heckele and W. K. Schomburg, "Review on micro molding of thermoplastic polymers," J. Micromech. Microeng., vol.14, no.3, p. R1, Mar. 2004.
22. D. A. Mair, E. Geiger, A. P. Pisano, J. M. J. Frechet, and F. Svec, "Injection molded microfluidic chips featuring integrated interconnects," Lab Chip, vol.6, pp. 1346-1354, 2006.
23. C. R. Friedrich, R. R. K. Avula, and S. Gugale, "A fluid microconnector seal for packaging applications," J. Micromech. Microeng., vol.15, no.6, pp. 1115-1124, Apr. 2005.
24. R. Lo and E. Meng, "Integrated and reusable in-plane microfluidic interconnects," Sens. Actuators B, Chem., vol.132, no.2, pp. 531-539, Jun. 2008.
25. E. S. Lee, D. Howard, E. Liang, S. D. Collins, and R. L. Smith, "Removable tubing interconnects for glass-based micro-fluidic systems made using ECDM," J. Micromech. Microeng., vol.14, no.4, pp. 535-541, Apr. 2004.
26. A. Puntambekar and C. H. Ahn, "Self-aligning microfluidic interconnects for glass-and plastic-based microfluidic systems," J. Micromech. Microeng., vol.12, no.1, pp. 35-40, Jan. 2002.
27. A. V. Pattekar and M. V. Kothare, "Novel microfluidic interconnectors for high temperature and pressure applications," J. Micromech. Microeng., vol.13, no.2, pp. 337-345, Feb. 2003.
28. T. Pan, A. Baldi, and B. Ziaie, "A reworkable adhesive-free interconnection technology for microfluidic systems," J. Microelectromech. Syst., vol.15, no.1, pp. 267-272, Feb. 2006.
29. B. L. Gray, D. Jaeggi, N. J. Mourlas, B. P. van Drieenhuizen, K. R. Williams, N. I. Maluf, and G. T. A. Kovacs, "Novel interconnection technologies for integrated microfluidic systems," Sens. Actuators A, Phys., vol.77, no.1, pp. 57-65, Sep. 1999.
30. D. Figeys, Y. Ning, and R. Aebersold, "A microfabricated device for rapid protein identification by microelectrospray ion trap mass spectrometry," Anal. Chem., vol.69, no.16, pp. 3153-3160, Aug. 1997.
31. C. K. Fredrickson and Z. H. Fan, "Macro-to-micro interfaces for microflu-idic devices," Lab Chip, vol.4, no.6, pp. 526-533, Dec. 2004.
32. V. Nittis, R. Fortt, C. H. Legge, and A. J. Mello, "A high-pressure interconnect for chemical microsystem applications," Lab Chip, vol.1, no.2, pp. 148-152, Dec. 2001.
33. D. A. Mair, M. Rolandi, M. Snauko, R. Noroski, F. Svec, and J. M. J. Fréchet, "Room-temperature bonding for plastic high-pressure microflu-idic chips," Anal. Chem., vol.79, no.13, pp. 5097-5102, Jul. 2007.
34. G. J. M. Bruin, "Recent developments in electrokinetically driven analysis on microfabricated devices," Electrophoresis, vol.21, no.18, pp. 3931-13151, Dec. 2000.
35. D. Hermes, T. Heuser, E. Wouden, J. Gardeniers, and A. Berg, "Fabrication of microfluidic networks with integrated electrodes," Microsyst. Technol., vol.12, no.5, pp. 436-440, Mar. 2006.
36. S. J. Baldock, P. R. Fielden, N. J. Goddard, J. E. Prest, and B. J. Treves Brown, "Integrated moulded polymer electrodes for performing conductivity detection on isotachophoresis microdevices," J. Chromatogr. A, vol. 990, no. 1/2, pp. 11-22, Mar. 2003.
37. X. Cai, N. Klauke, A. Glidle, P. Cobbold, G. L. Smith, and J. M. Cooper, "Ultra-low-volume, real-time measurements of lactate from the single heart cell using microsystems technology," Anal. Chem., vol.74, no.4, pp. 906-914, Feb. 2002.
38. S. Gawad, L. Schild, and P. Renaud, "Micromachined impedance spec-troscopy flow cytometer for cell analysis and particle sizing," Lab Chip, vol.1, no.1, pp. 76-82, Sep. 2001.
39. S. Z. Hua, F. Sachs, D. X. Yang, and H. D. Chopra, "Microfluidic actuation using electrochemically generated bubbles," Anal. Chem., vol.74, no.24, pp. 6392-6396, Dec. 2002.
40. H. Shekhar, V. Chathapuram, S. H. Hyun, H. Seungkwan, and H. J. Cho, "A disposable microsensor for continuous monitoring of free chlorine in water," in Proc. IEEE Sensors, 2003, pp. 67-70.
41. D. S. Lee, H. Yang, K. H. Chung, and H. B. Pyo, "Wafer-scale fabrication of polymer-based microdevices via injection molding and photolithographic micropatterning protocols," Anal. Chem., vol.77, no.16, pp. 5414-5420, 2005.
42. E. Meng and Y.-C. Tai, "A parylene MEMS flow sensing array," in Proc. 12th IEEE Int. Conf. Solid-State Sens., Actuators, Microsyst. TRANSDUCERS, 2003, pp. 686-689.
43. Q. Luo, S. Mutlu, Y. B. Gianchandani, F. Svec, and J. M. J. Fréchet, "Monolithic valves for microfluidic chips based on thermoresponsive polymergels," Electrophoresis, vol.24, no.21, pp. 3694-3702, Nov. 2003.
44. C. Yu, S. Mutlu, P. Selvaganapathy, C. H. Mastrangelo, F. Svec, and J. M. J. Frechet, "Flow control valves for analytical microfluidic chips without mechanical parts based on thermally responsive monolithic polymers," Anal. Chem., vol.75, no.8, pp. 1958-1961, Apr. 2003.
45. D. T. Eddington and D. J. Beebe, "Flow control with hydrogels," Adv. Drug Del. Rev., vol.56, no.2, pp. 199-210, Feb. 2004.
46. C. Wei and J. H. Chen, "The fabrication of hydrogel as a microvalve in microfluidic system," Mater. Res. Soc. Bull., vol.5, pp. 69-74, 2005.
47. M. E. Harmon, M. Tang, and C. W. Frank, "A microfluidic actuator based on thermoresponsive hydrogels," Polymer, vol.44, no.16, pp. 4547-4556, Jul. 2003.
48. A. Richter, S. Howitz, D. Kuckling, and K. F. Arndt, "Influence of volume phase transition phenomena on the behavior of hydrogel-based valves," Sens. Actuators B, Chem., vol. 99, no. 2/3, pp. 451-458, May 2004.
49. D. J. Beebe, J. S. Moore, J. M. Bauer, Q. Yu, R. H. Liu, C. Devadoss, and B. Jo, "Functional hydrogel structures for autonomous flow control inside microfluidic channels," Nature, vol.404, no.6778, pp. 588-590, Apr. 2000.
50. R. C. Jaeger, Introduction to Microelectronic Fabrication. Englewood Cliffs, NJ: Prentice-Hall, 2002.
51. G. Chen, F. Svec, and D. R. Knapp, "Light-actuated high pressure-resisting microvalve for on-chip flow control based on thermo-responsive nanostructured polymer," Lab Chip, vol.8, no.7, pp. 1198-1204, Jul. 2008.
52. S. Mutlu, Y. Cong, F. Svec, C. H. Mastrangelo, J. M. J. Fréchet, and Y. B. Gianchandani, "A thermally responsive polymer microvalve without mechanical parts photo-patterned in a parylene channel," in Proc. 12th IEEE Int. Conf. Solid-State Sens., Actuators, Microsyst. TRANSDUCERS, Y. Cong, Ed., 2003, pp. 802-805.
53. H. Neff, W. Zong, A. M. N. Lima, M. Borre, and G. Holzhuter, "Optical properties and instrumental performance of thin gold films near the surface plasmon resonance," Thin Solid Films, vol. 496, no. 1/2, pp. 688-697, Feb. 2006.
54. A. Han, O. Wang, M. Graff, S. K. Mohanty, T. L. Edwards, K. H. Han, and A. B. Frazier, "Multi-layer plastic/glass microfluidic systems containing electrical and mechanical functionality," Lab Chip, vol.3, no.3, pp. 150-157, Aug. 2003.
55. A. Han, M. Graff, O. Wang, and A. B. Frazier, "An approach to multilayer microfluidic systems with integrated electrical, optical, and mechanical functionality," IEEE Sensors J., vol.5, no.1, pp. 82-89, Feb. 2005.
56. D. Nikolova, E. Dayss, G. Leps, and A. Wutzler, "Surface modification of cycloolefinic copolymers for optimization of the adhesion to metals," Surf. Interface Anal., vol.36, no.8, pp. 689-693, 2004.
57. X. Zhang and C. Chu, "Preparation of thermosensitive pNIPAAM hydro-gels with superfast response," Chem. Commun., vol.7, no.3, pp. 350-351, Feb. 2004.
58. D. A. Mair, T. R. Schwei, T. S. Dinio, F. Svec, and J. M. J. Frechet, "Use of photopatterned porous polymer monoliths as passive micromixers to enhance mixing efficiency for on-chip labeling reactions," Lab Chip, vol.9, no.7, pp. 877-883, Apr. 2009.