Temperature control in thermal microactuators with applications to in-situ nanomechanical testing

Applied Physics Letters

Volumn 102, Issue 1, 2013, Pages

  Qin, Qingquan ^a   Zhu, Yong ^a  

^a North Carolina State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATOR DISPLACEMENT; LOW TEMPERATURES; MODELING STUDIES; MULTI-PHYSICS; NANO SCALE; NANOMECHANICAL TESTING; THERMAL ACTUATOR; THERMAL MICROACTUATORS;

FINITE ELEMENT METHOD; HEAT SINKS; MICROACTUATORS; SURFACE MICROMACHINING;

MECHANICAL TESTING;

EID: 84872336131     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4773359     Document Type: Article

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