On-chip mechanical characterization using an electro-thermo-mechanical actuator

Experimental Mechanics

Volumn 50, Issue 6, 2010, Pages 695-707

  Corigliano, A ^a   Domenella, L ^a   Langfelder, G ^a  

^a POLITECNICO DI MILANO   (Italy)

Author keywords

Electro thermo mechanical actuator; Experimental results; Mechanical characterization; MEMS; Multi physics FE simulations

Indexed keywords

EXPERIMENTAL RESULTS; FE-SIMULATION; MECHANICAL CHARACTERIZATIONS; MULTI-PHYSICS; THERMO-MECHANICAL;

CAPACITANCE; DATA REDUCTION; POLYSILICON; TENSILE STRENGTH;

ACTUATORS;

EID: 77953871597     PISSN: 00144851     EISSN: 17412765     Source Type: Journal    
DOI: 10.1007/s11340-009-9266-1     Document Type: Article

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