MEMS-Based Nanomechanics: Influence of MEMS Design on Test Temperature

Experimental Mechanics

Volumn 52, Issue 6, 2012, Pages 607-617

  Pant, B ^a   Choi, S ^a   Baumert, E K ^a   Allen, B L ^a   Graham, S ^a   Gall, K ^a   Pierron, O N ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

MEMS; Nanocrystalline metals; Nanomechanics

Indexed keywords

ELECTROTHERMAL ACTUATION; FINITE ELEMENT MODELING; LOAD SENSOR; MEMS DESIGN; MEMS MATERIALS; MEMSDEVICES; MICRO-RAMAN TEMPERATURE MEASUREMENTS; NANOCRYSTALLINE METAL; NANOCRYSTALLINES; TENSILE TESTS; TEST TEMPERATURES; THERMAL ACTUATOR; THERMO-MECHANICAL BEHAVIORS; MICRO ELECTROMECHANICAL SYSTEM (MEMS);

ELECTROMECHANICAL DEVICES; MEMS; NANOMECHANICS; NANOSTRUCTURED MATERIALS; SURFACE MICROMACHINING; TEMPERATURE MEASUREMENT; TENSILE TESTING; FINITE ELEMENT METHOD;

DESIGN;

EID: 84861482147     PISSN: 00144851     EISSN: 17412765     Source Type: Journal    
DOI: 10.1007/s11340-011-9526-8     Document Type: Article

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