An electrothermal microactuator with Z-shaped beams

Journal of Micromechanics and Microengineering

Volumn 20, Issue 8, 2010, Pages

  Guan, Changhong ^a   Zhu, Yong ^a  

^a North Carolina State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATION VOLTAGES; AVERAGE TEMPERATURE; BEAM WIDTHS; COMB DRIVE; DESIGN PARAMETERS; DEVICE STRUCTURES; ELECTRIC RESISTIVITY; ELECTRO-THERMAL MICROACTUATORS; EXPERIMENTAL MEASUREMENTS; FEATURE SIZES; FINITE ELEMENT ANALYSIS; IN-PLANE MOTION; LOAD SENSOR; MULTI-PHYSICS; OUTPUT FORCE; QUASI-STATIC; SHAPED BEAM; THERMAL ACTUATOR; THERMAL MICROACTUATORS;

ELECTRIC CONDUCTIVITY; MICROACTUATORS; STIFFNESS; SURFACE MICROMACHINING;

FINITE ELEMENT METHOD;

EID: 77957759202     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/8/085014     Document Type: Article

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