Z-shaped MEMS thermal actuators: Piezoresistive self-sensing and preliminary results for feedback control

Journal of Microelectromechanical Systems

Volumn 21, Issue 3, 2012, Pages 596-604

  Ouyang, Jing ^a   Zhu, Yong ^a  

^a North Carolina State University   (United States)

Author keywords

Feedback control; nanomechanical testing; piezoresistivity; self sensing; thermal actuator; Z shaped

Indexed keywords

NANOMECHANICAL TESTING; PIEZORESISTIVITY; SELF-SENSING; THERMAL ACTUATOR; Z-SHAPED;

ELECTROMECHANICAL DEVICES; MECHANICAL TESTING; MEMS; MICROACTUATORS; NANOTECHNOLOGY; SCANNING ELECTRON MICROSCOPY; SENSORS; SURFACE MICROMACHINING;

FEEDBACK CONTROL;

EID: 84861860921     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2012.2189361     Document Type: Article

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