A novel checker-patterned AlN MEMS resonator as gravimetric sensor

Sensors and Actuators, A: Physical

Volumn 189, Issue , 2013, Pages 298-306

  Heidari, Amir ^a,b   Yoon, Yong Jin ^b   Lee, Man I ^a   Khine, Lynn ^a   Park, Mi Kyoung ^a   Tsai, Julius Ming Lin ^a,c  

^a INSTITUTE OF MICROELECTRONICS   (Singapore)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^c NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Aluminium nitride (AlN) resonator; Checker mode resonator (CHR); Contour mode resonator (CMR); Mass sensing; Microelectromechanical system (MEMS) resonator; Piezoelectric resonator; Width extensional mode resonator (WXR)

Indexed keywords

CHECKER-MODE RESONATOR (CHR); CONTOUR-MODE RESONATORS; MASS SENSING; MODE RESONATORS; PIEZOELECTRIC RESONATORS;

ALUMINUM; ALUMINUM NITRIDE; FINITE ELEMENT METHOD; MEMS; MICROELECTROMECHANICAL DEVICES; NITRIDES; SENSORS;

RESONATORS;

EID: 84870536852     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2012.09.027     Document Type: Article

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