High sensitive dielectric filled Lamé mode mass sensor

Sensors and Actuators, A: Physical

Volumn 188, Issue , 2012, Pages 82-88

  Heidari, Amir ^a,b   Yoon, Yong Jin ^b   Park, Mi Kyoung ^a   Park, Woo Tae ^c   Tsai, Julius Ming Lin ^a,d  

^a INSTITUTE OF MICROELECTRONICS   (Singapore)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^c Seoul National University of Science and Technology   (South Korea)

^d NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Capacitive filled gap transducer; Limit of detection; Mass sensitivity; Mass sensor

Indexed keywords

BIO-DETECTIONS; EXCITATION MECHANISMS; EXPERIMENTAL MEASUREMENTS; GAS SENSING; HIGH POTENTIAL; LIMIT OF DETECTION; MASS SENSITIVITY; MASS SENSOR; MEMS PROCESS; NEW HIGH; POLYELECTROLYTE MULTILAYER; RESONANCE FREQUENCIES; SILICON ON INSULATOR; SINGLE CRYSTAL SILICON; THEORETICAL PREDICTION;

FABRICATION; RESONATORS; SENSORS;

CAPACITIVE SENSORS;

EID: 84870052839     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2012.03.040     Document Type: Conference Paper

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