Micromachined acoustic resonant mass sensor

Journal of Microelectromechanical Systems

Volumn 14, Issue 4, 2005, Pages 699-706

  Zhang, Hao ^a   Kim, Eun Sok ^a  

^a University of Southern California ^*  (United States)

Author keywords

Acoustic resonator; Film bulk acoustic resonator (FBAR); Mass sensor; Microbalance; Quartz crystal microbalance (QCM)

Indexed keywords

MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MICROSENSORS; PIEZOELECTRIC MATERIALS; SENSITIVITY ANALYSIS; SILICON NITRIDE;

FILM BULK ACOUSTIC RESONATOR; MASS SENSOR; QUARTZ CRYSTAL MICROBALANCE;

ACOUSTIC RESONATORS;

EID: 24644488706     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2005.845405     Document Type: Article

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