Ultrasensitive dielectric filled Lamé mode biomass sensor

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Volumn , Issue , 2011, Pages 2259-2262

  Heidari, Amir ^a,b   Yoon, Yong Jin ^b   Park, Mi Kyoung ^a   Park, Woo Tae ^a   Tsai Ming Lin, Julius ^a  

^a INSTITUTE OF MICROELECTRONICS   (Singapore)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Biosensor; capacitive filled gap transducer; mass sensitivity; motional resistance; quality factor

Indexed keywords

BIOLOGICAL AGENTS; BIOMASS SENSORS; CAPACITIVE FILLED GAP TRANSDUCER; HIGH POTENTIAL; HIGH QUALITY; MASS SENSITIVITY; MEMS PROCESS; MOTIONAL RESISTANCE; NEW HIGH; OUTPUT SIGNAL; QUALITY FACTOR; QUALITY FACTORS; RESONANT MODE; SILICON ON INSULATOR; ULTRASENSITIVE;

ACTUATORS; ATMOSPHERIC PRESSURE; BIOSENSORS; MICROSYSTEMS; SOLID-STATE SENSORS;

BIOMASS;

EID: 80052119520     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/TRANSDUCERS.2011.5969338     Document Type: Conference Paper

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