Analysis and design of a high performance and low cost bio-mass sensor based on the radial contour mode disk resonator

Microelectronic Engineering

Volumn 88, Issue 8, 2011, Pages 1730-1732

  Heidari, Amir ^a   Yoon, Yong Jin ^a   Choi, Hae Jin ^b  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b Chung Ang University   (South Korea)

Author keywords

Biosensor; Mass sensitivity; Motional resistance; Radial contour mode resonator

Indexed keywords

ANALYSIS AND DESIGN; CONTOUR MODE; COST EFFECTIVE; DISK RESONATOR; LOW COSTS; MASS CHANGE; MASS SENSITIVITY; MOTIONAL RESISTANCE; MULTIPHYSICS SIMULATIONS; NEW DEVICES; RADIAL-CONTOUR-MODE RESONATOR;

BIOSENSORS; COST EFFECTIVENESS; DIELECTRIC MATERIALS; RESONATORS;

COST BENEFIT ANALYSIS;

EID: 79960056117     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2011.01.054     Document Type: Conference Paper

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