Design of novel mechanical coupling for contour mode piezoelectric RF MEMS filters

Journal of Physics: Conference Series

Volumn 34, Issue 1, 2006, Pages 342-349

  Stephanou, P J ^a   Piazza, G ^b   White, C D ^a   Wijesundara, M B J ^a   Pisano, A P ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b UNIVERSITY OF PENNSYLVANIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33744536391     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/34/1/056     Document Type: Article

References (8)

1. Piazza G, P J Stephanou, et al 2005 Low Motional Resistance Ring-Shaped Contour-Mode Aluminum Nitride Piezoelectric Resonators for UHF Applications Proc. IEEE MEMS'05 (Miami)
2. Piazza G, P J Stephanou, et al 2005 Single-Chip Multiple-Frequency Filters Based on Contour-Mode Aluminum Nitride Piezoelectric Micromechanical Resonators Proc. IEEE Transducers'05 p 2065-2068
3. Wang K, C T-C Nguyen 1999 High-Order Medium Frequency Microelectromechanical Electronic Filters J. MEMS. 8 534-557 no. 4
4. Stephanou P J, G Piazza, et al 2006 Mechanically Coupled Contour Mode Piezoelectric Aluminum Nitride MEMS Filters Proc. IEEE MEMS'06 (Istanbul)
5. Sheahan D F, R A Johnson 1975 Crystal and Mechanical Filters IEEE Trans. Circuits Syst. CAS-22 69-89
6. Lakin K M, et al 1995 Development of Miniature Filters for Wireless Applications IEEE Trans. Microwave Theor. Tech. 43 2933-2939 no. 12
7. Ruby R, Y Oshmyansky, et al 1999 PCS 1900 MHz duplexer using thin film bulk acoustic resonators (FBARs) Electronics Lett. 35 794
8. Temes G C, S K Mitra 1973 Modern Filter Theory and Design (Wiley & Sons, New York)