Simulation based design of disk resonator biosensors under fabrication uncertainty

Journal of Mechanical Design

Volumn 134, Issue 4, 2012, Pages

  Heidari, Amir ^a   Yoon, Yong Jin ^a   Son, Hungsun ^a   Choi, Hae Jin ^b  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b Chung Ang University   (South Korea)

Author keywords

bioMEMS; biosensor; disk resonator; fabrication uncertainty; robust design; simulation based design

Indexed keywords

COST EFFECTIVENESS; DESIGN; DIELECTRIC MATERIALS; FABRICATION; RESONATORS; UNCERTAINTY ANALYSIS;

ANALYSIS MODELS; BIOMEMS; DISK RESONATOR; FABRICATION UNCERTAINTIES; HIGH COSTS; MOTIONAL RESISTANCE; RADIAL CONTOUR MODES; ROBUST DESIGN APPROACH; ROBUST DESIGNS; SIMULATION-BASED DESIGNS;

BIOSENSORS;

EID: 84859077396     PISSN: 10500472     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.4006144     Document Type: Article

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