A femtogram resolution mass sensor platform based on SOI electrostatically driven resonant cantilever. Part II: Sensor calibration and glycerine evaporation rate measurement

Ultramicroscopy

Volumn 106, Issue 8-9, 2006, Pages 808-814

  Teva, J ^a   Abadal, G ^a   Torres, F ^a   Verd, J ^a   Perez Murano F ^b   Barniol, N ^a  

^a UNIVERSITAT AUTÒNOMA DE BARCELONA   (Spain)

^b INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

Author keywords

Cantilever based sensors; Evaporation rate; Mass sensor; MEMS

Indexed keywords

CANTILEVER BEAMS; ELECTRODES; EVAPORATION; MICROELECTROMECHANICAL DEVICES; SILICON ON INSULATOR TECHNOLOGY; TRANSDUCERS;

CANTILEVER BASED SENSORS; EVAPORATION RATE; MASS SENSORS;

SENSORS;

GLYCEROL;

ARTICLE; BIOSENSOR; CALIBRATION; ELECTRICITY; EVAPORATION; GENETIC TRANSDUCTION; MEASUREMENT; NOISE; RAMAN SPECTROMETRY;

GLYCERINE;

EID: 33745745445     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ultramic.2005.12.017     Document Type: Article

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