Localized-mass detection based on thin-film bulk acoustic wave resonators (FBAR): Area and mass location aspects

Sensors and Actuators, A: Physical

Volumn 142, Issue 1, 2008, Pages 322-328

  Campanella, Humberto ^a,b   Uranga, Arantxa ^b   Romano Rodríguez, Albert ^c   Montserrat, Josep ^a   Abadal, Gabriel ^b   Barniol, Nuria ^b   Esteve, Jaume ^a  

^a INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

^b UNIVERSITAT AUTÒNOMA DE BARCELONA   (Spain)

^c UNIVERSITY OF BARCELONA   (Spain)

Author keywords

BAW; FBAR; Mass sensors; Responsivity and sensitivity of sensors; Thin film bulk acoustic wave resonators

Indexed keywords

ACOUSTIC WAVES; RESONATORS; SENSITIVITY ANALYSIS;

BAW; FREQUENCY SHIFTING; LOCALIZED-MASS SENSORS; MASS SENSORS; RESPONSIVITY AND SENSITIVITY OF SENSORS; THIN-FILM BULK ACOUSTIC WAVE RESONATORS;

THIN FILM DEVICES;

EID: 38849102299     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.05.004     Document Type: Article

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