All-stencil transistor fabrication on 3D silicon substrates

Journal of Micromechanics and Microengineering

Volumn 22, Issue 9, 2012, Pages

  Villanueva, L G ^a   Vazquez Mena, O ^a   Martin Olmos, C ^a   Savu, V ^a   Sidler, K ^a   Montserrat, J ^b   Langlet, P ^a   Hibert, C ^a   Vettiger, P ^a   Bausells, J ^b   Brugger, J ^a  

^a EPFL   (Switzerland)

^b CSIC   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

3-D SUBSTRATE; ELECTRONIC COMPONENT; FLAT SUBSTRATES; PLANAR SUBSTRATE; RADIATION SENSORS; SILICON SUBSTRATES; STANDARD MATERIALS; STENCIL LITHOGRAPHY;

LITHOGRAPHY; SUBSTRATES;

THREE DIMENSIONAL;

EID: 84866339168     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/22/9/095022     Document Type: Article

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