Resistivity measurements of gold wires fabricated by stencil lithography on flexible polymer substrates

Microelectronic Engineering

Volumn 85, Issue 5-6, 2008, Pages 1108-1111

  Sidler, K ^a   Vazquez Mena, O ^a   Savu, V ^a   Villanueva, G ^a   van den Boogaart, M A F ^a   Brugger, J ^a  

^a EPFL   (Switzerland)

Author keywords

Flexible electronics; Flexible substrate; Polymer; Resistivity; Shadow mask; Stencil lithography

Indexed keywords

CHARACTERIZATION; ELECTRIC CONDUCTIVITY; LITHOGRAPHY; MICROFABRICATION; POLYETHYLENE TEREPHTHALATES; POLYIMIDES;

FLEXIBLE ELECTRONICS; FLEXIBLE SUBSTRATES; SHADOW MASK; STENCIL LITHOGRAPHY;

ELECTRIC WIRE;

EID: 44149126460     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.12.069     Document Type: Article

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