Characterization and control of unconfined lateral diffusion under stencil masks

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 25, Issue 3, 2007, Pages 857-861

  Rácz, Zoltán ^a   Seabaugh, Alan ^a  

^a University of Notre Dame   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHARACTERIZATION; DIFFUSION; ELECTRON BEAMS; EVAPORATION; OXIDATION; REDUCTION;

DEPOSITED MATERIALS; FICKIAN DIFFUSION; STENCIL MASKS; THIN LAYERS;

MASKS;

EID: 34249902767     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2737437     Document Type: Article

References (18)

1. M. M. Deshmukh, D. C. Ralph, M. Thomas, and J. Silcox, Appl. Phys. Lett. 75, 1631 (1999).
2. R. Lüthi, R. R. Schlittler, J. Brugger, P. Vettiger, M. E. Welland, and J. K. Gimzewski, Appl. Phys. Lett. 75, 1314 (1999).
3. Z. Racz, J. Vac. Sci. Technol. B 22, 74 (2004).
4. A. R. Champagne, A. J. Couture, F. Kuemmeth, and D. C. Ralph, Appl. Phys. Lett. 82, 1111 (2003).
5. S. Egger, A. Ilie, Y. Fu, J. Chongsathien, D. J. Kang, and M. E. Welland, Nano Lett. 5, 15 (2005).
6. B. Voigtländer and M. Kästner, Surf. Sci. 464, 131 (2000).
7. L. L. Levenson, A. B. Swartzlander, A. Yahashi, H. Usui, and I. Yamada, Scanning Microsc. 5, 679 (1991).
8. V. Blech, T. Nobuyuki, and B. Kim, J. Vac. Sci. Technol. B 24, 1 (2006).
9. P. Shewmon, Diffusion in Solids, 2nd ed. (The Minerals, Metals, and Materials Society, Warrendale, PA, 1989), p. 36.
10. F. Y. Ǵnin, J. Appl. Phys. 77, 5130 (1995).
11. T. S. Cale, M. K. Jain, D. S. Taylor, R. L. Duffin, and C. J. Tracy, J. Vac. Sci. Technol. B 11, 2 (1993).
12. M. Bäumer and H.-J. Freund, Prog. Surf. Sci. 61, 127 (1999).
13. G. Raynerd, M. Hardiman, and J. A. Venables, Phys. Rev. B 44, 13803 (1991).
14. J. A. Thornton, Annu. Rev. Mater. Sci. 7, 239 (1977).
15. K. L. Chopra, Thin Film Phenomena (McGraw-Hill, New York, 1969), p. 230.
16. H. L. Caswell and Y. Budo, J. Appl. Phys. 35, 644 (1964).
17. H. L. Caswell, J. Appl. Phys. 32, 2641 (1961).
18. M. Ohring, The Materials Science of Thin Films (Academic, Boston, 1992), p. 54.