High-resolution resistless nanopatterning on polymer and flexible substrates for plasmonic biosensing using stencil masks

ACS Nano

Volumn 6, Issue 6, 2012, Pages 5474-5481

  Vazquez Mena, Oscar ^a   Sannomiya, Takumi ^b   Tosun, Mahmut ^a   Villanueva, Luis G ^a   Savu, Veronica ^a   Voros, Janos ^b   Brugger, Juergen ^a  

^a EPFL   (Switzerland)

^b ETH ZURICH   (Switzerland)

Author keywords

biosensors; flexible substrates; nanodots; nanopatterning; nanowires; plasmonic; stencil

Indexed keywords

FLEXIBLE SUBSTRATE; NANODOTS; NANOPATTERNING; PLASMONIC; STENCIL;

BIOSENSORS; MICROCHANNELS; NANOTECHNOLOGY; NANOWIRES; PLASMONS; POLYIMIDES; POLYMERS; PROTEINS; SURFACE PLASMON RESONANCE;

SUBSTRATES;

NANOPARTICLE; POLYMER;

ARTICLE; CHEMISTRY; EQUIPMENT; EQUIPMENT DESIGN; GENETIC PROCEDURES; IMMUNOASSAY; INSTRUMENTATION; METHODOLOGY; MOLECULAR IMPRINTING; SURFACE PLASMON RESONANCE; ULTRASTRUCTURE; YOUNG MODULUS;

BIOSENSING TECHNIQUES; ELASTIC MODULUS; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; IMMUNOASSAY; MOLECULAR IMPRINTING; NANOPARTICLES; POLYMERS; SURFACE PLASMON RESONANCE;

EID: 84862872788     PISSN: 19360851     EISSN: 1936086X     Source Type: Journal    
DOI: 10.1021/nn301358n     Document Type: Article

References (39)

1. Ko, H. C.; Stoykovich, M. P.; Song, J.; Malyarchuk, V.; Choi, W. M.; Yu, C.-J.; Geddes, J. B., III; Xiao, J.; Wang, S.; Huang, Y. et al. A Hemispherical Electronic Eye Camera Based on Compressible Silicon Optoelectronics Nature 2008, 454, 748-753
2. Lacour, S. P.; Jones, J.; Wagner, S.; Li, T.; Suo, Z. Stretchable Interconnects for Elastic Electronic Surfaces Proc. IEEE 2005, 93, 1459-1467
3. Kim, D.-H.; Lu, N.; Ma, R.; Kim, Y.-S.; Kim, R.-H.; Wang, S.; Wu, J.; Won, S. M.; Tao, H.; Islam, A. et al. Epidermal Electronics Science 2011, 333, 838-843
4. Mannsfeld, S. C. B.; Tee, B. C. K.; Stoltenberg, R. M.; Chen, C. V. H. H.; Barman, S.; Muir, B. V. O.; Sokolov, A. N.; Reese, C.; Bao, Z. Highly Sensitive Flexible Pressure Sensors with Microstructured Rubber Dielectric Layers Nat. Mater. 2010, 9, 859-864
5. Someya, T.; Sekitani, T.; Iba, S.; Kato, Y.; Kawaguchi, H.; Sakurai, T. A Large-Area Flexible Pressure Sensor Matrix with Organic Field-Effect Transistors for Artificial Skin Applications Proc. Natl. Acad. Sci. U.S.A. 2004, 101, 9966-9970
6. Rosset, S.; Niklaus, M.; Dubois, P.; Shea, H. R. Large-Stroke Dielectric Elastomer Actuators with Ion-Implanted Electrodes J. Microelectromech. Syst. 2009, 18, 1300-1308
7. Sekitani, T.; Yokota, T.; Zschieschang, U.; Klauk, H.; Bauer, S.; Takeuchi, K.; Takamiya, M.; Sakurai, T.; Someya, T. Organic Nonvolatile Memory Transistors for Flexible Sensor Arrays Science 2009, 326, 1516-1519
8. Fan, Z.; Razavi, H.; Do, J.-w.; Moriwaki, A.; Ergen, O.; Chueh, Y.-L.; Leu, P. W.; Ho, J. C.; Takahashi, T.; Reichertz, L. A. et al. Three-Dimensional Nanopillar-Array Photovoltaics on Low-Cost and Flexible Substrates Nat. Mater. 2009, 8, 648-653
9. Kraus, T.; Malaquin, L.; Schmid, H.; Riess, W.; Spencer, N. D.; Wolf, H. Nanoparticle Printing with Single-Particle Resolution Nat. Nanotechnol. 2007, 2, 570-576
10. Fan, Z.; Ho, J. C.; Jacobson, Z. A.; Yerushalmi, R.; Alley, R. L.; Razavi, H.; Javey, A. Wafer-Scale Assembly of Highly Ordered Semiconductor Nanowire Arrays by Contact Printing Nano Lett. 2008, 8, 20-25
11. McAlpine, M. C.; Ahmad, H.; Wang, D. W.; Heath, J. R. Highly Ordered Nanowire Arrays on Plastic Substrates for Ultrasensitive Flexible Chemical Sensors Nat. Mater. 2007, 6, 379-384
12. Cheng, W.; Park, N.; Walter, M. T.; Hartman, M. R.; Luo, D. Nanopatterning Self-Assembled Nanoparticle Superlattices by Moulding Microdroplets Nat. Nanotechnol. 2008, 3, 682-690
13. Hwang, J. K.; Cho, S.; Dang, J. M.; Kwak, E. B.; Song, K.; Moon, J.; Sung, M. M. Direct Nanoprinting by Liquid-Bridge-Mediated Nanotransfer Moulding Nat. Nanotechnol. 2010, 5, 742-748
14. Deshmukh, M. M.; Ralph, D. C.; Thomas, M.; Silcox, J. Nanofabrication Using a Stencil Mask Appl. Phys. Lett. 1999, 75, 1631-1633
15. Villanueva, G.; Vazquez-Mena, O.; van den Boogaart, M. A. F.; Sidler, K.; Pataky, K.; Savu, V.; Brugger, J. Etching of Sub-micrometer Structures through Stencil Microelectron. Eng. 2008, 85, 1010-1014
16. Villanueva, L. G.; Martin-Olmos, C.; Vazquez-Mena, O.; Brugger, J.; Langlet, P.; Bausells, J.; Monserrat, J. Localized Ion-Implantation through Micro/Nanostencil Masks IEEE Trans. Nanotechnol. 2011, 10, 940-946
17. Vazquez-Mena, O.; Villanueva, G.; van den Boogaart, M. A. F.; Savu, V.; Brugger, J. Reusability of Nanostencils for the Patterning of Aluminum Nanostructures by Selective Wet Etching Microelectron. Eng. 2008, 85, 1237-1240
18. Aksu, S.; Yanik, A. A.; Adato, R.; Artar, A.; Huang, M.; Altug, H. High-Throughput Nanofabrication of Infrared Plasmonic Nanoantenna Arrays for Vibrational Nanospectroscopy Nano Lett. 2010, 10, 2511-2518
19. Tun, T. N.; Lwin, M.; Kim, A. H. H.; Chandrasekhar, A. N.; Joachim, C. Wetting Studies on Au Nanowires Deposited through Nanostencil Masks Nanotechnology 2007, 18, 335301
20. Sidler, K.; Vazquez-Mena, O.; Savu, V.; Villanueva, G.; van den Boogaart, M. A. F.; Brugger, J. Resistivity Measurements of Gold Wires Fabricated by Stencil Lithography on Flexible Polymer Substrates Microelectron. Eng. 2008, 85, 1108-1111
21. Sidler, K.; Cvetkovic, N. V.; Savu, V.; Tsamados, D.; Ionescu, A. M.; Brugger, J. Organic Thin Film Transistors on Flexible Polyimide Substrates Fabricated by Full-Wafer Stencil Lithography Sens. Actuators, A 2010, 162, 155-159
22. 2 and Polymer Substrates. EIPBN'2010, Anchorage, AK, 2010.
23. Aksu, S.; Huang, M.; Artar, A.; Yanik, A. A.; Selvarasah, S.; Dokmeci, M. R.; Altug, H. Flexible Plasmonics on Unconventional and Nonplanar Substrates Adv. Mater. 2011, 23, 4422-4430
24. Vazquez-Mena, O.; Villanueva, L. G.; Savu, V.; Sidler, K.; Langlet, P.; Brugger, J. Analysis of the Blurring in Stencil Lithography Nanotechnology 2009, 20, 415303
25. Vazquez-Mena, O.; Sidler, K.; Savu, V.; Park, C. W.; Villanueva, L. G.; Brugger, J. Reliable and Improved Nanoscale Stencil Lithography by Membrane Stabilization, Blurring, and Clogging Corrections IEEE Trans. Nanotechnol. 2011, 10, 352-357
26. Sidler, K.; Villanueva, L. G.; Vazquez-Mena, O.; Savu, V.; Brugger, J. Compliant Membranes Improve Resolution in Full-Wafer Micro/Nanostencil Lithography Nanoscale 2012, 4, 773-778
27. Vazquez-Mena, O.; Sannomiya, T.; Villanueva, L. G.; Voros, J.; Brugger, J. Metallic Nanodot Arrays by Stencil Lithography for Plasmonic Biosensing Applications ACS Nano 2010, 5, 844-853
28. Drummond, C. J.; Chan, D. Y. C. van der Waals Interaction, Surface Free Energies, and Contact Angles: Dispersive Polymers and Liquids Langmuir 1997, 13, 3890-3895
29. Bohren, C. F.; Huffman, D. R. Surface Modes in Small Particles. In Absorption and Scattering of Light by Small Particles; John Wiley and Sons, Inc.: New York, 1998.
30. Lamprecht, B.; Schider, G.; Lechner, R. T.; Ditlbacher, H.; Krenn, J. R.; Leitner, A.; Aussenegg, F. R. Metal Nanoparticle Gratings: Influence of Dipolar Particle Interaction on the Plasmon Resonance Phys. Rev. Lett. 2000, 84, 4721-4724
31. Haynes, C. L.; McFarland, A. D.; Zhao, L.; Van Duyne, R. P.; Schatz, G. C.; Gunnarsson, L.; Prikulis, J.; Kasemo, B.; Käll, M. Nanoparticle Optics: The Importance of Radiative Dipole Coupling in Two-Dimensional Nanoparticle Arrays J. Phys. Chem. B 2003, 107, 7337-7342
32. Danckwerts, M.; Novotny, L. Optical Frequency Mixing at Coupled Gold Nanoparticles Phys. Rev. Lett. 2007, 98, 026104
33. Sannomiya, T.; Sahoo, P., K.; Mahcicek, D., I.; Solak, H., H.; Hafner, C.; Grieshaber, D.; Voros, J. Biosensing by Densely Packed and Optically Coupled Plasmonic Particle Arrays Small 2009, 5, 1889-1896
34. Haes, A. J.; Van Duyne, R. P. A Nanoscale Optical Biosensor: Sensitivity and Selectivity of an Approach Based on the Localized Surface Plasmon Resonance Spectroscopy of Triangular Silver Nanoparticles J. Am. Chem. Soc. 2002, 124, 10596-10604
35. Anker, J. N.; Hall, W. P.; Lyandres, O.; Shah, N. C.; Zhao, J.; Van Duyne, R. P. Biosensing with Plasmonic Nanosensors Nat. Mater. 2008, 7, 442-453
36. Sannomiya, T.; Hafner, C.; Voros, J. In Situ Sensing of Single Binding Events by Localized Surface Plasmon Resonance Nano Lett. 2008, 8, 3450-3455
37. Mayadas, A. F.; Shatzkes, M. Electrical-Resistivity Model for Polycrystalline Films: The Case of Arbitrary Reflection at External Surfaces Phys. Rev. B 1970, 1, 1382-1389
38. Durkan, C.; Welland, M. E. Size Effects in the Electrical Resistivity of Polycrystalline Nanowires Phys. Rev. B 2000, 61, 14215-14218
39. Vazquez-Mena, O.; Villanueva, G.; Savu, V.; Sidler, K.; van den Boogaart, M. A. F.; Brugger, J. Metallic Nanowires by Full Wafer Stencil Lithography Nano Lett. 2008, 8, 3675-3682